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Volumn 18, Issue 1, 2013, Pages 221-229

Flatness-based active vibration control for piezoelectric actuators

Author keywords

Active vibration control; differential flatness; nonlinear control; piezoelectric actuators; sky hook

Indexed keywords

ACCURATE RESPONSE; ACTIVE VIBRATION CONTROLS; ACTIVE VIBRATION DAMPING; AFM; ATOMIC FORCE MICROSCOPE (AFM); CONTROL STRATEGIES; DIFFERENTIAL FLATNESS; EXTERNAL LOADS; EXTERNAL VIBRATIONS; FEED-FORWARD; FEEDBACK GAIN; FLATNESS-BASED CONTROL; FREQUENCY RANGES; INSTABILITY PROBLEMS; MATHEMATICAL DESCRIPTIONS; NANOMETRICS; NON LINEAR CONTROL; OSCILLATORY MOVEMENTS; RATE DEPENDENCE; SKY-HOOK; TRAJECTORY TRACKING;

EID: 84866511620     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2011.2166998     Document Type: Article
Times cited : (53)

References (23)
  • 2
    • 0141637168 scopus 로고    scopus 로고
    • Active damping within an advanced microlithography system using piezoelectric smart discs
    • J. Holterman and T. J. A. de Vries, "Active damping within an advanced microlithography system using piezoelectric smart discs," Mechatronics, vol. 14, no. 1, pp. 15-34, 2004.
    • (2004) Mechatronics , vol.14 , Issue.1 , pp. 15-34
    • Holterman, J.1    De Vries, T.J.A.2
  • 3
    • 18844438602 scopus 로고    scopus 로고
    • Active damping based on decoupled collocated control
    • DOI 10.1109/TMECH.2005.844702
    • J. Holterman and T. J. A. de Vries, "Active damping based on decoupled collocated control," IEEE/ASME Trans. Mechatronics, vol. 10, no. 2, pp. 135-145, 2005. (Pubitemid 40679577)
    • (2005) IEEE/ASME Transactions on Mechatronics , vol.10 , Issue.2 , pp. 135-145
    • Holterman, J.1    De Vries, T.J.A.2
  • 4
    • 34250825475 scopus 로고    scopus 로고
    • Frequency variation for the purpose of vibration isolation
    • DOI 10.1109/ICMECH.2006.252519, 4018354, 2006 IEEE International Conference on Mechatronics, ICM
    • A. A. Hanieh and A. Preumont, "Frequency variation for the purpose of vibration isolation," in Proc. IEEE Int. Conf. Mechatron., 2006, pp. 176-180. (Pubitemid 46970430)
    • (2006) 2006 IEEE International Conference on Mechatronics, ICM , pp. 176-180
    • Hanieh, A.A.1    Preumont, A.2
  • 5
    • 54349105478 scopus 로고    scopus 로고
    • Integral resonant control of a piezoelectric tube actuator for fast nanoscale positioning
    • B. Bhikkaji and S. O. R. Moheimani, "Integral resonant control of a piezoelectric tube actuator for fast nanoscale positioning," IEEE/ASME Trans. Mechatronics, vol. 13, no. 5, pp. 530-537, 2008.
    • (2008) IEEE/ASME Trans. Mechatronics , vol.13 , Issue.5 , pp. 530-537
    • Bhikkaji, B.1    Moheimani, S.O.R.2
  • 6
    • 79956141466 scopus 로고    scopus 로고
    • An analytical generalized PrandtlIshlinskii model inversion for hysteresis compensation in micropositioning control
    • (DOI: 10.1109/TMECH.2010.2052366)
    • M. A. Janaideh, S. Rakheja, and C.-Y. Su, "An analytical generalized PrandtlIshlinskii model inversion for hysteresis compensation in micropositioning control," IEEE/ASME Trans. Mechatronics, (DOI: 10.1109/TMECH.2010.2052366).
    • IEEE/ASME Trans. Mechatronics
    • Janaideh, M.A.1    Rakheja, S.2    Su, C.-Y.3
  • 7
    • 61549133477 scopus 로고    scopus 로고
    • Robust adaptive control of coupled parallel Piezo-Flexural nanopositioning stages
    • S. Bashash and N. Jalili, "Robust adaptive control of coupled parallel Piezo-Flexural nanopositioning stages," IEEE/ASME Trans. Mechatronics, vol. 14, no. 1, 2009.
    • (2009) IEEE/ASME Trans. Mechatronics , vol.14 , Issue.1
    • Bashash, S.1    Jalili, N.2
  • 9
    • 33745864340 scopus 로고    scopus 로고
    • Smart structures and materials2006: Modeling, signal processing, and control
    • Douglas K. Lindner, Ed.
    • W. S. Oates and R. C. Smith, "Smart structures and materials 2006: Modeling, signal processing, and control," in Proc. SPIE, Douglas K. Lindner, Ed., vol. 6166, 2006, pp. 334-345.
    • (2006) Proc. SPIE , vol.6166 , pp. 334-345
    • Oates, W.S.1    Smith, R.C.2
  • 10
    • 0035248273 scopus 로고    scopus 로고
    • Piezomechanics using intelligent variable-structure control
    • DOI 10.1109/41.904550, PII S0278004601011182
    • C. L. Hwang, C. Jan, and Y.-H. Chen, "Piezomechanics using intelligent variable-structure control," IEEE Trans. Ind. Electron., vol. 48, no. 1, pp. 47-59, 2001. (Pubitemid 32271117)
    • (2001) IEEE Transactions on Industrial Electronics , vol.48 , Issue.1 , pp. 47-59
    • Hwang, C.-L.1    Jan, C.2    Chen, Y.-H.3
  • 11
    • 0041361907 scopus 로고    scopus 로고
    • Two-time scale fuzzy logic controller of flexible link robot arm
    • J. Lin and F. L. Lewis, "Two-time scale fuzzy logic controller of flexible link robot arm," Fuzzy Sets Syst., vol. 139, no. 1, pp. 125-149, 2003.
    • (2003) Fuzzy Sets Syst. , vol.139 , Issue.1 , pp. 125-149
    • Lin, J.1    Lewis, F.L.2
  • 12
    • 23944444739 scopus 로고    scopus 로고
    • Fully adaptive vibration control for uncertain structure installed with MR damper
    • FrC06.6, Proceedings of the 2005 American Control Conference, ACC
    • T. Terasawa, "Fully adaptive vibration control for uncertain structure installed with MR Damper," in Proc. Amer. Control Conf., 2005, vol. 7, pp. 4753-4759. (Pubitemid 41188755)
    • (2005) Proceedings of the American Control Conference , vol.7 , pp. 4753-4759
    • Terasawa, T.1    Sano, A.2
  • 13
    • 32944468063 scopus 로고    scopus 로고
    • Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners
    • DOI 10.1109/TCST.2005.860511
    • A. J. Fleming and R. Moheimani, "Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners," IEEE Trans. Control Syst. Technol., vol. 14, no. 1, pp. 33-44, 2006. (Pubitemid 43256803)
    • (2006) IEEE Transactions on Control Systems Technology , vol.14 , Issue.1 , pp. 33-44
    • Fleming, A.J.1    Moheimani, S.O.R.2
  • 14
    • 19944388990 scopus 로고    scopus 로고
    • Model reaching adaptive control for vibration isolation
    • DOI 10.1109/TCST.2004.841684
    • L. Zuo, J.-J. E. Slotine, and S.A.Nayfeh, "Model reaching adaptive control for vibration isolation," IEEE Trans. Control Syst. Technol., vol. 13, no. 4, pp. 611Pr-617, 2005. (Pubitemid 41005121)
    • (2005) IEEE Transactions on Control Systems Technology , vol.13 , Issue.4 , pp. 611-617
    • Zuo, L.1    Slotine, J.-J.E.2    Nayfeh, S.A.3
  • 15
    • 69549114431 scopus 로고    scopus 로고
    • Disturbance-observer-based hysteresis compensation for piezoelectric actuators
    • J.Yi, S. Chang, andY. Shen, "Disturbance-observer-based hysteresis compensation for piezoelectric actuators," IEEE/ASME Trans. Mechatronics, vol. 14, no. 4, pp. 456-464, 2009.
    • (2009) IEEE/ASME Trans. Mechatronics , vol.14 , Issue.4 , pp. 456-464
    • Yi, J.1    Chang, S.2    Shen, Y.3
  • 16
    • 77649193560 scopus 로고    scopus 로고
    • General bond graph model for piezoelectric actuators and methodology for experimental identification
    • J. M. Rodriguez-Fortun, J. Orus, F. Buil, and J. A. Castellanos, "General bond graph model for piezoelectric actuators and methodology for experimental identification," Mechatronics, vol. 20, no. 2, pp. 303-314, 2010.
    • (2010) Mechatronics , vol.20 , Issue.2 , pp. 303-314
    • Rodriguez-Fortun, J.M.1    Orus, J.2    Buil, F.3    Castellanos, J.A.4
  • 17
    • 71649102616 scopus 로고    scopus 로고
    • Model-based piezoelectric hysteresis and creep compensation for highly-dynamic feedforward rest-to-rest motion control of piezoelectrically actuated flexible structures
    • L. Gaul and J. Becker, "Model-based piezoelectric hysteresis and creep compensation for highly-dynamic feedforward rest-to-rest motion control of piezoelectrically actuated flexible structures," Int. J. Eng. Sci., vol. 47, pp. 1193-1207, 2009.
    • (2009) Int. J. Eng. Sci. , vol.47 , pp. 1193-1207
    • Gaul, L.1    Becker, J.2
  • 18
    • 63449090009 scopus 로고    scopus 로고
    • A new drive concept for high-speed positioning of piezoelectric actuators
    • Bremen, Germany Jun.
    • K. Kuhnen, H. Janocha, D. Thull, and A. Kugi, "A new drive concept for high-speed positioning of piezoelectric actuators," in Proc. 10th Int. Conf. New Actuat., Bremen, Germany Jun.2006, pp. 82-85.
    • (2006) Proc. 10th Int. Conf. New Actuat. , pp. 82-85
    • Kuhnen, K.1    Janocha, H.2    Thull, D.3    Kugi, A.4
  • 19
    • 0029327262 scopus 로고
    • Flatness and defect of nonlinear systems: Introductory theory and examples
    • M. Fliess, J. Levine, Ph. Martin, and P. Rouchon, "Flatness and defect of nonlinear systems: introductory theory and examples," Int. J. Control, vol. 61, no. 6, pp. 1327-1361, 1995.
    • (1995) Int. J. Control , vol.61 , Issue.6 , pp. 1327-1361
    • Fliess, M.1    Levine, J.2    Martin, Ph.3    Rouchon, P.4
  • 21
    • 0033713693 scopus 로고    scopus 로고
    • Design of a high-accuracy CMM based on multi-lateration techniques
    • E. B. Hughes, A. Wilson, and G. N. Peggs, "Design of a high-accuracy CMM based on multi-lateration techniques," Ann. CIRP, vol. 49/1/2000, pp. 391-394, 2000.
    • (2000) Ann. CIRP 49/1/2000 , pp. 391-394
    • Hughes, E.B.1    Wilson, A.2    Peggs, G.N.3
  • 23
    • 77955509062 scopus 로고    scopus 로고
    • A review of feedforward control approaches in nanopositioning for high-speed SPM
    • G. M. Clayton, S. Tien, K. K. Leang, Q. Zou, and S. Devasia, "A review of feedforward control approaches in nanopositioning for high-speed SPM," J. Dyn. Syst., Meas., Control, vol. 131, no. 6, p. 061101, 2009.
    • (2009) J. Dyn. Syst., Meas., Control , vol.131 , Issue.6 , pp. 061101
    • Clayton, G.M.1    Tien, S.2    Leang, K.K.3    Zou, Q.4    Devasia, S.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.