Superhard behaviour, low residual stress, and unique structure in diamond-like carbon films by simple bilayer approach

Journal of Applied Physics

Volumn 112, Issue 2, 2012, Pages

  Dwivedi, Neeraj ^a,b   Kumar, Sushil ^a   Malik, Hitendra K ^b  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; BI-LAYER; CHEMICAL VAPOR; DIAMOND-LIKE CARBON COATINGS; NANO-STRUCTURED; NANOMECHANICAL PROPERTY; RADIO FREQUENCIES; RF PLASMA; SELF-BIAS; SUPERHARD;

ATOMIC FORCE MICROSCOPY; CARBON FILMS; HARDNESS; HYBRID SYSTEMS; INDUSTRIAL APPLICATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SYNTHETIC DIAMONDS;

HARD COATINGS;

EID: 84865524312     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4739287     Document Type: Article

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