Mechanical properties of a-C:H multilayer films

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1833-1838

  Qi, J ^a,b   Lai, K H ^a   Lee, C S ^a   Bello, I ^a   Lee, S T ^a   Luo, J B ^b   Wen, S Z ^b  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Amorphous hydrogenated carbon; Hardness; Young's modulus

Indexed keywords

CARBON; CYCLOTRONS; ELECTRON RESONANCE; MECHANICAL PROPERTIES; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

NANOIDENTATION TESTS;

AMORPHOUS FILMS;

DIAMOND-LIKE CARBON;

EID: 0035448759     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00437-X     Document Type: Article

References (20)