Effect of nitrogen content at coating film and film thickness on nanohardness and Young's modulus of hydrogenated carbon films

Diamond and Related Materials

Volumn 13, Issue 1, 2004, Pages 42-53

  Lin, Jen Fin ^a   Wei, Pal Jen ^a   Pan, Jing Chang ^a   Ai, Chi Fong ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

Hydrogenated amorphous carbon films; Nanohardness; Young's modulus

Indexed keywords

AMORPHOUS MATERIALS; CARBON; ELASTIC MODULI; HARDNESS; HYDROGENATION; INDENTATION; NITROGEN; PLASTIC DEFORMATION;

CARBON FILMS; COATING FILMS;

THIN FILMS;

COATING; FILM THICKNESS; HARDNESS;

EID: 1642440300     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.08.019     Document Type: Article

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