Structure and mechanical properties of Ag-incorporated DLC films prepared by a hybrid ion beam deposition system

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 248-251

  Choi, Heon Woong ^a,b   Choi, Jung Hae ^a   Lee, Kwang Ryeol ^a   Ahn, Jae Pyoung ^a   Oh, Kyu Hwan ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Ag incorporation; Bond structure; Diamond like carbon (DLC); Hybrid ion beam deposition; Mechanical properties; Microstructure

Indexed keywords

BENZENE; DIAMONDS; ION BEAM ASSISTED DEPOSITION; MICROSTRUCTURE;

AG INCORPORATION; ATOMIC BOND STRUCTURE; BOND STRUCTURE; DIAMOND-LIKE CARBON (DLC); HYBRID ION BEAM DEPOSITION;

SILVER COMPOUNDS;

EID: 36049018955     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.154     Document Type: Article

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