Characterization of DC magnetron sputtered diamond-like carbon (DLC) nano coating

International Journal of Advanced Manufacturing Technology

Volumn 38, Issue 7-8, 2008, Pages 705-717

  Yeldose, Binu C ^a   Ramamoorthy, B ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Adhesion; DLC; Micro hardness; Surface coating

Indexed keywords

ADHESION; CLADDING (COATING); COATINGS; CUTTING TOOLS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; HARDNESS; MAGNETRON SPUTTERING; METAL CUTTING; METALS; MOLECULAR BEAM EPITAXY; MULTILAYERS; REACTIVE SPUTTERING; SPUTTER DEPOSITION; STANDARDS; SUBSTRATES; TESTING; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

ADHESION STRENGTHS; CLEANING PROCESSES; CO-EFFICIENT OF FRICTION; CRYSTALLINE PLANES; DC MAGNETRON; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON COATINGS; DLC; MICRO HARDNESS; MULTI LAYERING; MULTI-LAYER COATINGS; NANO COATINGS; PIN ON DISC TESTS; POWER DENSITIES; RAMAN MICROSCOPES; REACTIVE GASES; ROCKWELL HARDNESS TESTER; SPUTTERING PARAMETERS; SUBSTRATE PREPARATION; SUBSTRATE TEMPERATURE; SURFACE COATING; SURFACE PROFILOMETER; TARGET POWER DENSITY; VAPOR-DEPOSITION TECHNIQUES; X-RAY DIFFRACTOMETER;

DENSITY OF GASES;

EID: 49649106005     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-007-1131-8     Document Type: Article

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