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Volumn 509, Issue 4, 2011, Pages 1285-1293

Studies of nanostructured copper/hydrogenated amorphous carbon multilayer films

Author keywords

Low vacuum; Multilayer; Nanostructure

Indexed keywords

A-C:H FILMS; LOW VACUUM; MULTILAYER STRUCTURES; NANO-STRUCTURED; NANOSTRUCTURED MULTILAYERS; NANOSTRUCTURED SURFACE; NEAR INFRARED REGION; OPTICAL TRANSPARENCY; SECONDARY ION MASS SPECTROSCOPY; SPUTTERING TECHNIQUES; TEMPERATURE-DEPENDENT CONDUCTIVITY;

EID: 78649334705     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2010.10.016     Document Type: Article
Times cited : (51)

References (38)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.