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Applied Physics Letters

Volumn 78, Issue 5, 2001, Pages 631-633

Effect of residual stress on the Raman-spectrum analysis of tetrahedral amorphous carbon films

(4) Shin, Jin Koog a,b Lee, Churl Seung a,c Lee, Kwang Ryeol a Eun, Kwang Yong a

a Korea Institute of Science and Technology (South Korea)

b LG (South Korea)

c Yonsei University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001462280 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1343840 Document Type: Article

Times cited : (144)

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