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Volumn 83, Issue 9, 2009, Pages 1179-1183
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Improvement of adhesion of DLC coating on nitinol substrate by hybrid ion beam deposition technique
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Author keywords
Adhesion; DLC; Hybrid ion beam deposition; Nitinol
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Indexed keywords
AMORPHOUS SILICON (A-SI);
ANODE VOLTAGES;
ARGON ION BEAM;
DLC;
DLC COATINGS;
DLC FILM;
HYBRID ION BEAM DEPOSITION;
HYDROCARBON IONS;
ION BEAM DEPOSITION TECHNIQUE;
ION BEAM TREATMENT;
NITINOL;
RADIO FREQUENCIES;
STRESS VALUES;
ADHESION;
AMORPHOUS FILMS;
AMORPHOUS SILICON;
ARGON;
BEAM PLASMA INTERACTIONS;
CARBON FILMS;
CHEMICAL MODIFICATION;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
HYDROCARBONS;
ION BEAMS;
ION BOMBARDMENT;
MAGNETIC FILMS;
MOLECULAR BEAM EPITAXY;
PROTECTIVE COATINGS;
SUBSTRATES;
SURFACE TREATMENT;
IONS;
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EID: 67349225045
PISSN: 0042207X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.vacuum.2009.03.005 Document Type: Article |
Times cited : (31)
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References (23)
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