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Volumn 105, Issue 2, 2011, Pages 417-425

Field emission, morphological and mechanical properties of variety of diamond-like carbon thin films

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MORPHOLOGY; AUTOMOBILE PARTS; BI-LAYER; COPPER LAYER; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON THIN FILMS; DLC FILM; ELECTRICAL AND MECHANICAL PROPERTIES; ELECTRONIC MATERIALS; ENHANCED STABILITY; HIGH ENERGY RADIATION; MODIFIED DLC; NANO-STRUCTURED; NITROGEN INCORPORATION;

EID: 83555176214     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-011-6556-0     Document Type: Article
Times cited : (25)

References (31)
  • 8
    • 0037343492 scopus 로고    scopus 로고
    • 2003SeScT.18S.12R 10.1088/0268-1242/18/3/302
    • J. Robertson 2003 Semicond. Sci. Technol. 18 12 2003SeScT.18S.12R 10.1088/0268-1242/18/3/302
    • (2003) Semicond. Sci. Technol. , vol.18 , pp. 12
    • Robertson, J.1
  • 12
    • 0001766858 scopus 로고    scopus 로고
    • Conditioning of hydrogenated amorphous carbon thin films for field emission via current stressing
    • DOI 10.1063/1.1339999
    • J.D. Carey S.R.P. Silva 2001 Appl. Phys. Lett. 78 347 2001ApPhL.78.347C 10.1063/1.1339999 (Pubitemid 33731976)
    • (2001) Applied Physics Letters , vol.78 , Issue.3 , pp. 347-349
    • Carey, J.D.1    Silva, S.R.P.2
  • 13
    • 0000726010 scopus 로고    scopus 로고
    • A study of electron field emission as a function of film thickness from amorphous carbon films
    • DOI 10.1063/1.122894, PII S0003695198033518
    • R.D. Forrest A.P. Burden S.R.P. Silva 1998 Appl. Phys. Lett. 73 3784 1998ApPhL.73.3784F 10.1063/1.122894 (Pubitemid 128677533)
    • (1998) Applied Physics Letters , vol.73 , Issue.25 , pp. 3784-3786
    • Forrest, R.D.1    Burden, A.P.2    Silva, S.R.P.3    Cheah, L.K.4    Shi, X.5
  • 16
    • 0001732335 scopus 로고    scopus 로고
    • Nitrogen containing hydrogenated amorphous carbon for thin-film field emission cathodes
    • DOI 10.1063/1.116173, PII S0003695196010188
    • G.A.J. Amaratunga S.R.P. Silva 1996 Appl. Phys. Lett. 68 2529 1996ApPhL.68.2529A 10.1063/1.116173 (Pubitemid 126683965)
    • (1996) Applied Physics Letters , vol.68 , Issue.18 , pp. 2529-2531
    • Amaratunga, G.A.J.1    Silva, S.R.P.2
  • 18
    • 44049097655 scopus 로고    scopus 로고
    • Enhancement of electron field emission property with silver incorporation into diamondlike carbon matrix
    • DOI 10.1063/1.2926676
    • S.F. Ahmed M.W. Moon K.R. Lee 2008 Appl. Phys. Lett. 92 193502 2008ApPhL.92s3502A 10.1063/1.2926676 (Pubitemid 351713500)
    • (2008) Applied Physics Letters , vol.92 , Issue.19 , pp. 193502
    • Ahmed, S.F.1    Moon, M.-W.2    Lee, K.-R.3
  • 19
    • 70649092072 scopus 로고    scopus 로고
    • 10.1016/j.vacuum.2009.09.008
    • M. Deguchi A. Taomoto 2010 Vacuum 84 438 10.1016/j.vacuum.2009.09.008
    • (2010) Vacuum , vol.84 , pp. 438
    • Deguchi, M.1    Taomoto, A.2
  • 22
    • 36549055145 scopus 로고    scopus 로고
    • Combined growth of carbon nanotubes and carbon nanowalls by plasma-enhanced chemical vapor deposition
    • DOI 10.1016/j.carbon.2007.10.004, PII S000862230700509X
    • A. Malesevic S. Vizireanu R. Kemps A. Vanhulsel C.V. Haesendonck G. Dinescu 2007 Carbon 45 2932 10.1016/j.carbon.2007.10.004 (Pubitemid 350179732)
    • (2007) Carbon , vol.45 , Issue.15 , pp. 2932-2937
    • Malesevic, A.1    Vizireanu, S.2    Kemps, R.3    Vanhulsel, A.4    Haesendonck, C.V.5    Dinescu, G.6
  • 24
    • 0036680337 scopus 로고    scopus 로고
    • Carbon nanotube films as electron field emitters
    • DOI 10.1016/S0008-6223(02)00011-8, PII S0008622302000118
    • J.M. Bonard M. Croci C. Klinke R. Kurt O. Noury N. Weiss 2002 Carbon 40 1715 10.1016/S0008-6223(02)00011-8 (Pubitemid 34802127)
    • (2002) Carbon , vol.40 , Issue.10 , pp. 1715-1728
    • Bonard, J.-M.1    Croci, M.2    Klinke, C.3    Kurt, R.4    Noury, O.5    Weiss, N.6
  • 27
  • 28
    • 17944379512 scopus 로고    scopus 로고
    • Unusual stress behavior in W-incorporated hydrogenated amorphous carbon films
    • DOI 10.1063/1.1883328, 111902
    • A.Y. Wang H.S. Ahn K.R. Lee J.P. Ahn 2005 Appl. Phys. Lett. 86 111902 2005ApPhL.86k1902W 10.1063/1.1883328 (Pubitemid 40596992)
    • (2005) Applied Physics Letters , vol.86 , Issue.11 , pp. 1-3
    • Wang, A.-Y.1    Ahn, H.-S.2    Lee, K.-R.3    Ahn, J.-P.4
  • 29
    • 0021411716 scopus 로고
    • Hardness Measurements of Thin Films
    • DOI 10.1016/0040-6090(84)90123-8
    • B. Johnson S. Hogmark 1984 Thin Solid Films 114 257 1984TSF..114.257J 10.1016/0040-6090(84)90123-8 (Pubitemid 14588287)
    • (1984) Thin Solid Films , vol.114 , Issue.3 , pp. 257-269
    • Jonsson, B.1    Hogmark, S.2
  • 30
    • 0036605287 scopus 로고    scopus 로고
    • Amorphous hydrogenated carbon films: Effects of nitrogen and fluorine incorporation on the film microstructure and mechanical properties: A review
    • DOI 10.1016/S0022-3093(02)01031-1, PII S0022309302010311
    • F.L. Freire 2002 J. Non-Cryst. Solids 304 251 2002JNCS.304.251F 10.1016/S0022-3093(02)01031-1 (Pubitemid 34466952)
    • (2002) Journal of Non-Crystalline Solids , vol.304 , Issue.1-3 , pp. 251-258
    • Freire Jr., F.L.1
  • 31
    • 33846322566 scopus 로고    scopus 로고
    • Improving mechanical properties of amorphous carbon nitride films by titanium doping
    • DOI 10.1063/1.2404797
    • P. Xu J.J. Li Q. Wang Z.L. Wang C.Z. Gu 2007 J. Appl. Phys. 101 014312 2007JAP..101a4312X 10.1063/1.2404797 (Pubitemid 46120681)
    • (2007) Journal of Applied Physics , vol.101 , Issue.1 , pp. 014312
    • Xu, P.1    Li, J.J.2    Wang, Q.3    Wang, Z.L.4    Gu, C.Z.5    Cui, Z.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.