Mechanical properties of DLC films prepared in acetylene and methane plasmas using electron cyclotron resonance microwave plasma chemical vapor deposition

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1862-1867

  Lai, K H ^a   Chan, C Y ^a   Fung, M K ^a   Bello, I ^a   Lee, C S ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Diamond like carbon films; Electron cyclotron resonance; Mechanical properties; Methane and acetylene plasma

Indexed keywords

ACETYLENE; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; GRAPHITIZATION; HARDNESS; ION BOMBARDMENT; KINETIC ENERGY; METHANE; SILICON; STRESS ANALYSIS;

NANO-STARCH TEST;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON; INORGANIC COATING; MECHANICAL PROPERTY; VAPOR DEPOSITION;

EID: 0035449158     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00460-5     Document Type: Article

References (16)