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Volumn 10, Issue 2, 2001, Pages 132-138

Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

Author keywords

CVD; DLC; Electrical; Optical

Indexed keywords

ARGON; CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; HARDNESS; LIGHT ABSORPTION; METHANE; RAMAN SCATTERING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 0035248214     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00459-3     Document Type: Article
Times cited : (19)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.