Effect of ambient gaseous environment on the properties of amorphous carbon thin films

Materials Chemistry and Physics

Volumn 125, Issue 3, 2011, Pages 558-567

  Ishpal, ^a   Panwar, O S ^a   Kumar, Mahesh ^a   Kumar, Sushil ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

Author keywords

Amorphous carbon; Conductivity; Filtered cathodic jet carbon arc; XPS

Indexed keywords

AMBIENT GAS; AMORPHOUS CARBON THIN FILMS; ATOMIC FORCE MICROSCOPES; CARBON ARC; CARBON ATOMS; CHEMICAL BONDINGS; CONDUCTIVITY; DEPOSITED FILMS; ELECTRICAL AND MECHANICAL PROPERTIES; ELECTRICAL CONDUCTIVITY; FILTERED CATHODIC JET CARBON ARC; GAS ENVIRONMENT; GASEOUS ENVIRONMENTS; MORPHOLOGICAL STUDY; NANO-INDENTATION MEASUREMENTS; RAMAN STUDIES; SCANNING ELECTRON MICROSCOPE; X-RAY PHOTOELECTRONS; XPS;

AMORPHOUS CARBON; AMORPHOUS FILMS; ATOMIC SPECTROSCOPY; CHEMICAL BONDS; ELECTRIC CONDUCTIVITY; HARDNESS; HELIUM; HYDROGEN; MECHANICAL PROPERTIES; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

EID: 78650016650     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2010.10.016     Document Type: Article

References (68)

1. P.J. Fallon, V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, and J. Koskinen Phys. Rev. B 48 1993 4777
2. H. Sjostrom, S. Stafstrom, M. Roman, and J.F. Sundgren Phys. Rev. Lett. 75 1995 1336
3. D.R. Mackenzie, D. Muller, and B.A. Pailthorpe Phys. Rev. Lett. 67 1991 773
4. W. Kratschner, L.D. Lamb, K. Fostiropoulos, and D.R. Huffman Nature 347 1990 354
5. S. Ijima Nature 354 1991 56
6. D. Ugarte Nature 359 1992 707
7. G.A.J. Amaratunga, M. Chhowalla, C.J. Kiely, I. Alexandrou, R.A. Aharanov, and R. Devenish Nature 383 1996 321
8. M. Chhowalla, R.A. Aharanov, C.J. Kiely, I. Alexandrou, and G.A.J. Amaratunga Phil. Mag. Lett. 75 1997 329
9. B. Zheng, W.T. Zheng, K. Zhang, Q.B. Wen, J.Q. Zhu, S.H. Meng, X.D. He, and J.C. Han Carbon 44 2006 962
10. J.T. Titantah, and D. Lamoen Diamond Relat. Mater. 16 2007 581
11. H.W. Kroto, J.R. Heath, S.C. O'Brien, R.F. Curl, and R.E. Smalley Nature 318 1985 167
12. A. Oberlin, M. Endo, and T. Koyama J. Cryst. Growth 32 1976 335
13. C. Casiraghi, A.C. Ferrari, and J. Robertson Phys. Rev. B 72 2005 085401
14. A.C. Ferrari, S.E. Rodil, and J. Robertson Phys. Rev. B 67 2003 155306
15. C. Casiraghi, J. Robertson, and A.C. Ferrari Mater. Today 10 2007 44
16. J. Robertson Diamond Relat. Mater. 2 1993 984
17. J. Robertson Phil. Trans. R. Soc. A 342 1993 277
18. C. Donnet, and A. Erdemir Tribology of Diamond-like Carbon Films: Fundamentals and Applications 2007 Springer
19. P.N. Vishwakarma, V. Prasad, S.V. Subramanyam, and V. Ganeshan Bull. Mater. Sci. 28 6 2005 6009
20. H.F. Jiang, X.B. Tian, S.Q. Yang, R.K.Y. Fu, and P.K. Chu J. Vac. Sci. Technol. A 26 2008 1149
21. A.C. Ferrari Surf. Coat. Technol. 180-181 2004 190
22. Y. Lifshitz, G.D. Lempert, and E. Grossman Phys. Rev. Lett. 72 1994 2753
23. A.A. Voevodin, M.S. Donley, and J.S. Zabinski Surf. Coat. Technol. 52 1997 42
24. J. Schwan, S. Ulrich, H. Roth, H. Ehrhardt, S.R.P. Silva, J. Robertson, R. Samlenski, and R. Brenn J. Appl. Phys. 79 1996 1416
25. D.R. McKenzie Rep. Prog. Phys. 59 1996 1611
26. S. Anders, J. Diaz, J.W. Ager III, R.Y. Lo, and D.B. Bogy Appl. Phys. Lett. 71 1997 3367
27. E. Bertran, F.J. Pino, G. Viera, and J.L. Andujar Vacuum 64 2002 181
28. J. Li, W. Zheng, C. Gu, Z. Jin, Y. Zhao, X. Mei, Z. Mu, C. Dong, and C. Sun Carbon 42 2004 2309
29. P. Tian, X. Zhang, and Q.Z. Xue Carbon 45 2007 1764
30. O.S. Panwar, M.A. Khan, Mahesh Kumar, S.M. Shivaprasad, B.S. Satyanarayana, P.N. Dixit, R. Bhattacharya, and M.Y. Khan Thin Solid Films 516 2008 2331
31. J. Robertson Mater. Sci. Eng. R 37 2002 129
32. R. Hauert Tribol. Int. 37 2004 991
33. J.P. Sullivan, T.A. Friedmann, and K. Hjort MRS Bull. 26 2001 309
34. J.K. Luo, A.J. Flewitt, S.M. Spearing, N.A. Fleck, and W.I. Milne Appl. Phys. Lett. 85 2004 5748
35. A.C. Ferrari, and J. Robertson Phys. Rev. B 61 2000 14095
36. R.L. Boxman, S. Goldsmith, and A. Greenwood IEEE Trans. Plasma Sci. 25 1997 1174
37. A.C. Ferrari, J. Robertson, M.G. Beghi, C.E. Bottani, R. Ferulano, and R. Pastorelli Appl. Phys. Lett. 75 1999 1893
38. G.E. Mullenberg, Handbook of X-ray Photoelectron Spectroscopy 1979 Perkin Elmer Corporation MN, USA
39. E.E. Chamikh, A. Essafti, Y. Ijdhiyaou, and M. Azizan Solar Energy Mater. Solar Cells 90 2006 1420
40. K.Y. Amamoto, F. Kokai, Y. Koga, and S. Fujiwara New Diamond Front. Carbon Technol. 9 1999 289
41. K.Y. Amamoto, Y. Koga, and S. Fujiwara Jpn. J. Appl. Phys. 40 2001 L123
42. G.G. Wang, H.Y. Zhang, H.F. Zhou, X.P. Kuang, Q.B. Wu, H.B. Zuo, J.C. Han, and H.T. Ma Appl. Surf. Sci. 256 2010 3024
43. N. Hellgren, M.P. Johansson, E. Broitman, L. Hultman, and J.E. Sundgren Phys. Rev. B 59 1999 5162
44. P. Merel, M. Tabbal, M. Chaker, S. Moisa, and J. Margot Appl. Surf. Sci. 136 1998 105
45. N. Paik Surf. Coat. Technol. 200 2005 2170
46. C.K. Park, S.M. Chang, H.S. Uhm, S.H. Seo, and J.S. Park Thin Solid Films 420-421 2002 235
47. Y. Yamauchi, Y. Sasai, S.I. Kondo, and M. Kuzuya Thin Solid Films 518 2010 3492
48. R. McCann, S.S. Roy, P. Papakonstantinou, M.F. Bain, H.S. Gamble, and J.A. McLaughlin Thin Solid Films 482 2005 34
49. S.S. Roy, P. Papakosntantinou, R. McCann, J. McLaughlin, A. Klini, and N. Papadogiannis Appl. Phys. A 79 2004 1009
50. A.K.M.S. Chowdhary, D.C. Cameron, and M.S.J. Hashmi Surf. Coat. Technol. 112 1999 133
51. W.J. Hsieh, P.S. Shih, J.H. Lin, C.C. Lin, U.S. Chen, S.C. Huang, Y.S. Chang, and H.C. Shih Thin Solid Film 469-470 2004 120
52. D. Marton, K.J. Boyd, A.H. Al-Bayati, S.S. Todorov, and J.W. Rabalais Phys. Rev. Lett. 93 1994 118
53. L. Jiang, A.G. Fitzgerald, M.J. Rose, R. Cheung, B. Rong, and E. van der Drift Appl. Surf. Sci. 193 2002 144
54. N. Mutsukura, and K. Miyatani Diamond Relat. Mater. 4 1995 342
55. W.A. Chupka, and J. Berkowitz J. Chem. Phys. 54 1971 4256
56. J.X. Gou, Z. Sun, B.K. Tay, and X.W. Sun Appl. Surf. Sci. 214 2003 351
57. A. Champi, and F.C. Marques Thin Solid Films 501 2006 362
58. L.Y. Huang, K.W. Xu, J. Lu, B. Guelorget, and H. Chen Diamond Relat. Mater. 10 2001 1448
59. C.A. Taylor, M.F. Wayne, and W.K.S. Chiu Thin Solid Films 429 2003 190
60. E. Tomasella, C. Meunier, and S. Mikhailov Surf. Coat. Technol. 141 2001 286
61. J.K. Walters, R.J. Newport, W.S. Howells, and G.B. Wye J. Phys.: Condense Mater. 8 1996 4739
62. M.A. Monclus, A.K.M.S. Chowdhury, D.C. Cameron, R. Barklie, and M. Collins Surf. Coat. Technol. 131 2000 488
63. V.S. Veerasamy, G.A.J. Amaratunga, C.A. Davis, A.E. Timbs, W.I. Milne, and D.R. McKenzie J. Phys. Condens. Mater. 5 1993 L169
64. V.S. Veerasamy, J. Yuan, G.A.J. Amaratunga, W.I. Milne, K.W.R. Gilkes, M. Weiler, and L.M. Brown Phys. Rev. B 48 1993 954
65. C.A. Davis, D.R. McKenzie, Y. Yin, E. Kravtchinskaia, G.A.J. Amaratunga, and V.S. Veerasamy Phil. Mag. B 69 1994 1333
66. O.B. Lopez, M. Hoffman, A. Bendavid, and P.J. Martin Acta Mater. 56 2008 1633
67. X. Li, and B. Bhushan J. Mater. Res. 14 1999 2
68. D.A. Lucca, K. Herrmann, and M.J. Klopfstein CIRP Ann. Manuf. Technol. 59 2010 803