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Volumn 17, Issue 11, 2008, Pages 1949-1954
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Microstructure and mechanical properties of Mo/DLC nanocomposite films
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Author keywords
Composites; Diamond like carbon; Mechanical properties; Nanostructures
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Indexed keywords
CARBON FILMS;
CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMONDS;
MECHANICAL PROPERTIES;
MOLYBDENUM;
NANOCOMPOSITES;
NANOSTRUCTURED MATERIALS;
PLASMA DEPOSITION;
SILICON;
SILICON WAFERS;
SPUTTER DEPOSITION;
STAINLESS STEEL;
COMPOSITES;
DIAMOND-LIKE CARBON;
DOPED DIAMOND-LIKE CARBON;
NANO-COMPOSITE FILMS;
NANOSTRUCTURES;
RADIO FREQUENCY PLASMAS;
SI-WAFER;
STAINLESS STEELS;
UNBALANCED MAGNETRON SPUTTERING;
MAGNETRON SPUTTERING;
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EID: 52049083427
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2008.04.018 Document Type: Article |
Times cited : (122)
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References (27)
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