Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas

Journal of Physics D: Applied Physics

Volumn 45, Issue 30, 2012, Pages

  Zhang, Quan Zhi ^a   Zhao, Shu Xia ^b   Jiang, Wei ^c   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF ANTWERP   (Belgium)

^c HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON DISCHARGES; BOTTOM ELECTRODES; CAPACITIVELY COUPLED PLASMAS; HARMONIC AMPLITUDE; PARTICLE-IN-CELL COUPLED WITH MONTE CARLO COLLISIONS; POWER ABSORPTION; RADIAL PLASMA; SELF-BIAS;

PHASE SHIFT; PHASE SHIFTERS; PLASMA DENSITY;

SEPARATION;

EID: 84863733520     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/30/305203     Document Type: Article

References (35)

1. 2 closed-cycle dc electric-discharge convection lasers Appl. Phys. Lett. 21 25-7
2. 4/Ar Appl. Phys. Lett. 83 4637-9
3. Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
4. Makabe T and Petrović Z 2006 Plasma Electronics: Applications in Microelectronic Device Fabrication (Boca Raton, FL: Taylor and Francis)
5. Radjenović B and Radmilović-Radjenović M 2011 Top down nano technologies in surface modification of materials Cent. Eur. J. Phys. 9 265-75
6. Yamaguchi T, Komuro T, Koshimizu C, Takashima S, Takeda K, Kondo H, Ishikawa K, Sekine M and Hori M 2012 Direct current superposed dual-frequency capacitively coupled plasmas in selective etching of SIOCH over SiC J. Phys. D: Appl. Phys. 45 025203
7. Xu L, Chen L, Funk M, Ranjan A, Hummel M, Bravenec R, Sundararajan R, Economou D J and Donnelly V M 2008 Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge Appl. Phys. Lett. 93 261502
8. Hopwood J 1993 Ion bombardment energy distributions in a radio frequency induction plasma Appl. Phys. Lett. 62 940-2
9. Wang S-B and Wendt A E 2000 Control of ion energy distribution at substrates during plasma processing J. Appl. Phys. 88 643-6
10. Boyle P C, Ellingboe A R and Turner M M 2004 Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices J. Phys. D: Appl. Phys. 37 697
11. Lee J K, Manuilenko O V, Babaeva N Yu, Kim H C and Shon J W 2005 Ion energy distribution control in single and dual frequency capacitive plasma sources Plasma Sources Sci. Technol. 14 89 (Pubitemid 40308314)
12. Boyle P C, Ellingboe A R and Turner M M 2004 Electrostatic modelling of dual frequency rf plasma discharges Plasma Sources Sci. Technol. 13 493
13. Heil B G, Czarnetzki U, Brinkmann R P and Mussenbrock T 2008 On the possibility of making a geometrically symmetric rf-ccp discharge electrically asymmetric J. Phys. D: Appl. Phys. 41 165202
14. 2 Plasma Process. Polym. 6 370-9
15. Schulze J, Schungel E, Czarnetzki U, Gebhardt M, Brinkmann R P and Mussenbrock T 2011 Making a geometrically asymmetric capacitive rf discharge electrically symmetric Appl. Phys. Lett. 98 031501
16. Vahedi V and DiPeso G 1997 Simultaneous potential and circuit solution for two-dimensional bounded plasma simulation codes J. Comput. Phys. 131 149-63 (Pubitemid 127341387)
17. Wang H Y, Jiang W and Wang Y N 2010 Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: I. Analysis of numerical techniques Plasma Sources Sci. Technol. 19 045023
18. Jiang W, Wang H Y, Bi Z H and Wang Y N 2011 Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: II. Self-bias voltage effects in capacitively coupled plasmas Plasma Sources Sci. Technol. 20 035013
19. Vahedi V, Birdsall C K, Lieberman M A, DiPeso G and Rognlien T D 1993 Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations Phys. Fluids B 5 2719-29
20. Wakayama G and Nanbu K 2003 Study on the dual frequency capacitively coupled plasmas by the particle-in-cell/Monte Carlo method IEEE Trans. Plasma Sci. 31 638-44
21. Radmilović-Radjenović M and Lee J K 2005 Modeling of breakdown behavior in radio-frequency argon discharges with improved secondary emission model Phys. Plasmas 12 063501 (Pubitemid 41238589)
22. Radmilović-Radjenović M and Petrović Z Lj 2009 Influence of the surface conditions on rf plasma characteristics Eur. Phys. J. D 54 445-9
23. Schungel E, Zhang Q-Z, Iwashita S, Schulze J, Hou L-J, Wang Y-N and Czarnetzki U 2011 Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect J. Phys. D: Appl. Phys. 44 285205
24. Phelps A V and Petrović Z Lj 1999 Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons Plasma Sources Sci. Technol. 8 R21
25. Vahedi V and Surendra M 1995 A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges Comput. Phys. Commun. 87 179-98
26. Donko Z, Schulze J, Heil B G and Czarnetzki U 2009 Pic simulations of the separate control of ion flux and energy in ccrf discharges via the electrical asymmetry effect J. Phys. D: Appl. Phys. 42 025205
27. Zhang Q Z, Jiang W, Hou L J and Wang Y N 2011 Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge J. Appl. Phys. 109 013308
28. Donko Z, Schulze J, Czarnetzki U and Luggenholscher D 2009 Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges Appl. Phys. Lett. 94 131501
29. Schulze J, Schungel E, Czarnetzki U and Donko Z 2009 Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment, simulation, and model J. Appl. Phys. 106 063307
30. Schulze J, Schungel E, Donko Z and Czarnetzki U 2010 Excitation dynamics in electrically asymmetric capacitively coupled radio frequency discharges: experiment, simulation, and model Plasma Sources Sci. Technol. 19 045028
31. Gans T, Schulze J, O'Connell D, Czarnetzki U, Faulkner R, Ellingboe A R and Turner M M 2006 Frequency coupling in dual frequency capacitively coupled radio-frequency plasmas Appl. Phys. Lett. 89 261502 (Pubitemid 46057993)
32. Turner M M and Chabert P 2007 Electron heating mechanisms in dual-frequency capacitive discharges Plasma Sources Sci. Technol. 16 364 (Pubitemid 46646758)
33. Radouane K, Despax B, Yousfi M, Couderc J P, Klusmann E, Meyer H, Schulz R and Schulze J 2001 Two-dimensional electrical modeling of asymmetric radio-frequency discharges for geometry effect analysis. comparison with experiments J. Appl. Phys. 90 4346-54
34. Schulze J, Schungel E, Donko Z, Luggenholscher D and Czarnetzki U 2010 Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges J. Phys. D: Appl. Phys. 43 124016
35. Turner M M 2009 Collisionless heating in radio-frequency discharges: a review J. Phys. D: Appl. Phys. 42 194008