Making a geometrically asymmetric capacitive rf discharge electrically symmetric

Applied Physics Letters

Volumn 98, Issue 3, 2011, Pages

  Schulze, Julian ^a,b   Schüngel, Edmund ^b   Czarnetzki, Uwe ^b   Gebhardt, Markus ^b   Brinkmann, Ralf Peter ^b   Mussenbrock, Thomas ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE VALUES; ANALYTICAL MODELING; ARGON DISCHARGES; DRIVING FREQUENCIES; ION ENERGIES; PARTICLE-IN-CELL SIMULATIONS; RF DISCHARGE; SELF BIAS VOLTAGE;

ARGON;

EID: 79251552002     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3544541     Document Type: Article

References (18)

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