Influence of the surface conditions on rf plasma characteristics

European Physical Journal D

Volumn 54, Issue 2, 2009, Pages 445-449

  Radmilovic Radjenovic M ^a   Petrović, Z Lj ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; PLASMA SIMULATION; PLASMA THEORY; SECONDARY EMISSION; WAVE PLASMA INTERACTIONS;

DISCHARGE CHARACTERISTICS; ELECTRODE SURFACES; RF PLASMA; SECONDARY ELECTRON EMISSION COEFFICIENTS; SECONDARY ELECTRON EMISSIONS; STANDARD CONDITIONS; SURFACE CONDITIONS; SURFACE PREPARATION;

ELECTRIC DISCHARGES;

EID: 68549096376     PISSN: 14346060     EISSN: 14346079     Source Type: Journal    
DOI: 10.1140/epjd/e2009-00004-2     Document Type: Article

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