Top down nano technologies in surface modification of materials

Central European Journal of Physics

Volumn 9, Issue 2, 2011, Pages 265-275

  Radjenović, Branislav ^a   Radmilović Radjenović, Marija ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Etching; Low k dielectrics; Nanotechnology; Roughness; Surface modification

Indexed keywords

EID: 79951959656     PISSN: 18951082     EISSN: 16443608     Source Type: Journal    
DOI: 10.2478/s11534-010-0096-7     Document Type: Review

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