Modeling of breakdown behavior in radio-frequency argon discharges with improved secondary emission model

Physics of Plasmas

Volumn 12, Issue 6, 2005, Pages 1-8

  Radmilovic Radjenovic M ^a   Lee, J K ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRIC BREAKDOWN; ELECTRODES; MONTE CARLO METHODS;

FREQUENCY SCALING LAW; GAS PRESSURE; MONTE CARLO CODE; RADIO-FREQUENCY ARGON DISCHARGES;

ELECTRIC DISCHARGES;

EID: 24144460629     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1922267     Document Type: Article

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