Adhesion layer-bottom electrode interaction during Ba xSr 1-xTiO 3 growth as a limiting factor for device performance

Journal of Applied Physics

Volumn 111, Issue 12, 2012, Pages

  Lffler, Markus ^a   Vorobiev, Andrei ^a   Zeng, Lunjie ^a   Gevorgian, Spartak ^a   Olsson, Eva ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE RESONATORS; ADHESION LAYER; BOTTOM ELECTRODES; DEVICE PERFORMANCE; ELECTRODE INTERACTIONS; ELEVATED TEMPERATURE; GRAIN-BOUNDARY DIFFUSION; HIGH-TEMPERATURE RESISTANT; INTERFACE ROUGHNESS; ROOM TEMPERATURE; TIO;

FERROELECTRIC THIN FILMS; GRAIN BOUNDARIES; PLATINUM; TITANIUM DIOXIDE;

ADHESION;

EID: 84863511503     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4730781     Document Type: Article

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