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Journal of Materials Research

Volumn 12, Issue 2, 1997, Pages 347-354

Metallization schemes for dielectric thin film capacitors

(4) Al Shareef, H N a Dimos, D a Tuttle, B A a Raymond, M V a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; CRYSTALLIZATION; DEPOSITION; DIELECTRIC MATERIALS; ELECTRODES; FILM GROWTH; PLATINUM ALLOYS; SILICA; SOL-GELS; SUBSTRATES; THIN FILMS;

HILLOCK FORMATION; PLATINUM ELECTRODES;

CAPACITORS;

EID: 0031077357 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.1997.0050 Document Type: Article

Times cited : (32)

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