Tunable bulk acoustic wave resonators based on Ba 0.25Sr 0.75TiO 3 thin films and a HfO 2/SiO 2 Bragg reflector

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 58, Issue 12, 2011, Pages 2768-2771

  Berge, John ^a   Gevorgian, Spartak ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BULK ACOUSTIC WAVE RESONATOR; ELECTROMECHANICAL COUPLING COEFFICIENTS; PARAELECTRIC PHASE; SWITCHABLE; TIO; TUNING RANGES;

BARIUM; ELECTROMECHANICAL COUPLING; HAFNIUM OXIDES; RESONATORS; SILICON COMPOUNDS; THIN FILMS;

BRAGG REFLECTORS;

ACOUSTICS; ARTIFICIAL MEMBRANE; CERAMICS; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; EQUIPMENT FAILURE; LETTER; MICROELECTROMECHANICAL SYSTEM; OPTICAL INSTRUMENTATION; REFRACTOMETRY; SOUND; TRANSDUCER;

ACOUSTICS; CERAMICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LENSES; MEMBRANES, ARTIFICIAL; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; REFRACTOMETRY; SOUND; TRANSDUCERS;

EID: 84856991457     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.2142     Document Type: Article

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