Tunable solidly mounted thin film bulk acoustic resonators based on Ba xSr1-xTiO3 films

IEEE Microwave and Wireless Components Letters

Volumn 17, Issue 9, 2007, Pages 655-657

  Berge, John ^b   Vorobiev, Andrei ^b   Steichen, William ^c   Gevorgian, Spartak ^a,b,d  

^a IEEE

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c TEMEX   (France)

^d Ericsson Microwave Systems AB   (Sweden)

Author keywords

Bulk acoustic wave devices; Ferroelectric devices; Piezoelectric resonators; Tunable circuits and devices

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; BARIUM COMPOUNDS; BRAGG REFLECTORS; ELECTROMECHANICAL COUPLING; FERROELECTRIC DEVICES; NATURAL FREQUENCIES; PIEZOELECTRICITY; SILICON; THIN FILMS; TUNING;

ACOUSTIC RESONANCE; ELECTROMECHANICAL COUPLING COEFFICIENTS; PIEZOELECTRIC RESONATORS; TUNABLE CIRCUITS AND DEVICES;

ACOUSTIC RESONATORS;

EID: 34548229359     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2007.903445     Document Type: Article

References (12)

1. Avago Technologies [Online]. Available: http://www.avagotech.com, 2007
2. TriQuint Semiconductor [Online]. Available: http://www.tfrtech.com 2007
3. H.-T. Kim, H.-M. Lee, H.-K. Choi, J.-U. Bu, and K. Lee, "A thermally driven tunable TFBAR bandpass filter," in Proc. 34th EuMC, 2004, vol. 1, pp. 491-494.
4. A. P. S. Khanna, E. Gane, and T. Chong, "A 2 GHz voltage tunable FBAR oscillator," in IEEE MTT-S Int. Dig., 2003, vol. 2, pp. 717-720.
5. J. J. Kim, H. Zhang, W. Pang, H. Yu, and E. S. Kin, "Low phase noise, FBAR-based voltage controlled oscillator without varactor," in Proc. Transducers'05, 2005, pp. 1063-1066.
6. 3 thin films at microwave frequencies," Appl. Phys. Lett., vol. 85, pp. 624-626, 2004.
7. 3 films. Experiment and modeling," J. Appl. Phys., vol. 99, pp. 124112.1-124112.11, 2006.
8. G. Rupprecht and W. H. Winter, "Electromechanical behavior of single-crystal strontium titanate," Phys. Rev., vol. 155, pp. 1019-1028, 1967.
9. R. O. Bell and G. Rupprecht, "Elastic constants of strontium, titanate," Phys. Rev., vol. 129, pp. 90-94, 1963.
10. W. P. Mason, "Electrostrictive effect in barium titanate ceramics," Phys. Rev., vol. 74, pp. 1134-1147, 1948.
11. D. A. Berlincourt, D. R. Curran, and H. Jaffe, "Piezoelectric and piezomagnetic materials and their function in transducers," in Physical Acoustics, W. P. Mason, Ed. London, U.K.: Academic, 1964, vol. 1, pt. A.
12. 3 in the cubic phase," Phys. Status Solid A, vol. 26, pp. K153-K156, 1974.