Tunable thin film bulk acoustic wave resonators with improved Q-factor

Applied Physics Letters

Volumn 96, Issue 21, 2010, Pages

  Vorobiev, A ^a   Gevorgian, S ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC LOSS; FILM GRAIN; Q-FACTORS; RESONANCE FREQUENCIES; SPUTTER GAS; THIN-FILM BULK ACOUSTIC WAVE RESONATOR; TIO; TUNABLE THIN FILMS;

ACOUSTIC WAVES; ACOUSTICS; BARIUM; Q FACTOR MEASUREMENT; RESONANCE; RESONATORS; THIN FILMS; WAVE FILTERS;

ACOUSTIC RESONATORS;

EID: 77956255165     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3441413     Document Type: Article

References (12)

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