Oxygen diffusion through thin Pt films on Si(100)

Applied Physics A: Materials Science and Processing

Volumn 62, Issue 3, 1996, Pages 223-230

  Schmiedl, R ^a   Demuth, V ^a   Lahnor, P ^a   Godehardt, H ^a   Bodschwinna, Y ^a   Harder, C ^a   Hammer, L ^a   Strunk, H P ^a   Schulz, M ^a   Heinz, K ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; GRAIN BOUNDARIES; OXIDES; PLATINUM; SILICON; SILICON COMPOUNDS; THIN FILMS;

SILICIDES;

OXYGEN;

EID: 0030110261     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01575085     Document Type: Article

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