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Volumn 62, Issue 3, 1996, Pages 223-230

Oxygen diffusion through thin Pt films on Si(100)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; GRAIN BOUNDARIES; OXIDES; PLATINUM; SILICON; SILICON COMPOUNDS; THIN FILMS;

EID: 0030110261     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01575085     Document Type: Article
Times cited : (91)

References (34)
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    • (1990) IEEE Electron. Dev. Lett. , vol.11 , pp. 162
    • Tsaur, B.Y.1    Chen, C.K.2    Mattia, J.-P.3
  • 3
    • 0025418330 scopus 로고
    • B. Y. Tsaur, C. K. Chen, J.-P. Mattia: IEEE Electron. Dev. Lett. 11, 162 (1990) M. Kimata, N. Yutani, N. Tsubouchi, T. Seto: SPIE Proc. 1762, 350 (1992) T. L. Lin, J. Park, T. George, E. W. Jones: IEEE Trans. ED- 40, 2143 (1993)
    • (1992) SPIE Proc. , vol.1762 , pp. 350
    • Kimata, M.1    Yutani, N.2    Tsubouchi, N.3    Seto, T.4
  • 4
    • 84908059297 scopus 로고
    • B. Y. Tsaur, C. K. Chen, J.-P. Mattia: IEEE Electron. Dev. Lett. 11, 162 (1990) M. Kimata, N. Yutani, N. Tsubouchi, T. Seto: SPIE Proc. 1762, 350 (1992) T. L. Lin, J. Park, T. George, E. W. Jones: IEEE Trans. ED- 40, 2143 (1993)
    • (1993) IEEE Trans. , vol.ED-40 , pp. 2143
    • Lin, T.L.1    Park, J.2    George, T.3    Jones, E.W.4
  • 21
    • 5844308494 scopus 로고
    • Sputtering by Particle Bombardment II, ed by R. Behrisch, K. Wittmaak, Springer, Berlin, Heidelberg
    • G. Betz, G. K. Wehner: In Sputtering by Particle Bombardment II, ed by R. Behrisch, K. Wittmaak, Topics Appl. Phys, Vol. 52, 2nd edn. (Springer, Berlin, Heidelberg 1995) p. 32
    • (1995) Topics Appl. Phys, Vol. 52, 2nd Edn. , vol.52 , pp. 32
    • Betz, G.1    Wehner, G.K.2
  • 24
    • 0004184936 scopus 로고
    • New Series III/26 Springer, Berlin, Heidelberg
    • H. Mehrer (ed.): Landolt-Börnstein, New Series III/26 (Springer, Berlin, Heidelberg 1990) p. 630 J. R. Manning: Diffusion Kinetics for Atoms in Crystals (van Nostrand, Princeton, NJ 1968) p. 9 T. Heumann: Diffusion in Metallen (Springer, Berlin, Heidelberg 1992) pp. 238
    • (1990) Landolt-Börnstein , pp. 630
    • Mehrer, H.1
  • 25
    • 0003678406 scopus 로고
    • van Nostrand, Princeton, NJ
    • H. Mehrer (ed.): Landolt-Börnstein, New Series III/26 (Springer, Berlin, Heidelberg 1990) p. 630 J. R. Manning: Diffusion Kinetics for Atoms in Crystals (van Nostrand, Princeton, NJ 1968) p. 9 T. Heumann: Diffusion in Metallen (Springer, Berlin, Heidelberg 1992) pp. 238
    • (1968) Diffusion Kinetics for Atoms in Crystals , pp. 9
    • Manning, J.R.1
  • 26
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    • Springer, Berlin, Heidelberg
    • H. Mehrer (ed.): Landolt-Börnstein, New Series III/26 (Springer, Berlin, Heidelberg 1990) p. 630 J. R. Manning: Diffusion Kinetics for Atoms in Crystals (van Nostrand, Princeton, NJ 1968) p. 9 T. Heumann: Diffusion in Metallen (Springer, Berlin, Heidelberg 1992) pp. 238
    • (1992) Diffusion in Metallen , pp. 238
    • Heumann, T.1
  • 28
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    • See Ref. [19] Sect. 2.3 and 2.4
    • See Ref. [19] Sect. 2.3 and 2.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.