Shear mode coupling and properties dispersion in 8 GHz range AlN thin film bulk acoustic wave (BAW) resonator

Thin Solid Films

Volumn 514, Issue 1-2, 2006, Pages 341-343

  Martin, F ^a   Jan, M E ^a   Belgacem, B ^a   Dubois, M A ^b   Muralt, P ^a  

^a EPFL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

Aluminum nitride; Physical vapour deposition (PVD); Piezoelectric effect

Indexed keywords

ACOUSTIC DEVICES; ALUMINUM NITRIDE; MECHANICAL PROPERTIES; PHYSICAL VAPOR DEPOSITION; PIEZOELECTRICITY; SILICON WAFERS;

BULK ACOUSTIC WAVE (BAW); FILM THICKNESS; MECHANICAL COUPLING;

RESONATORS;

EID: 33745748156     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.03.005     Document Type: Article

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