Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators

Journal of Applied Physics

Volumn 110, Issue 2, 2011, Pages

  Vorobiev, A ^a   Berge, J ^a   Gevorgian, S ^a   Loffler M ^a   Olsson, E ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC LOSS; BOTTOM ELECTRODES; BULK ACOUSTIC WAVE RESONATOR; INTERFACE ROUGHNESS; INTRINSIC PROPERTY; Q-FACTORS; ROUGH INTERFACES; TIO; TUNABLE THIN FILMS; WAVE SCATTERING;

ACOUSTIC WAVES; ACOUSTICS; BARIUM; FERROELECTRIC FILMS; INTERFACES (MATERIALS); PLATINUM; RESONATORS;

ACOUSTIC RESONATORS;

EID: 79961121703     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3610513     Document Type: Article

References (15)

1. J. Berge, M. Norling, A. Vorobiev, and S. Gevorgian, J. Appl. Phys. 103, 064508 (2008). 10.1063/1.2896585
2. A. Noeth, T. Yamada, P. Muralt, A. K. Tagantsev, and N. Setter, IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 57, 379 (2010). 10.1109/TUFFC.2010.1417
3. G. N. Saddik, D. S. Boesch, S. Stemmer, and R. York, IEEE MTT-S Int. Microwave Symp. Dig. 1, 1263 (2008).
4. X. Zhu, J. D. Phillips, and A. Mortazawi, IEEE MTT-S Int. Microwave Symp. Dig. 1, 671 (2007).
5. Ken -ya Hashimoto, RF Bulk Acoustic Wave Filters for Communications (Artech House, Norwood, MA, 2009).
6. A. Vorobiev and S. Gevorgian, Appl. Phys. Lett. 96, 212904 (2010). 10.1063/1.3441413
7. R. Thalhammer, J. Kaitila, R. Aigner, and S. Marksteiner, Proc. IEEE Ultrason. Symp. 1, 282 (2004).
8. D. A. Berlincourt, D. R. Curran, and H. Jaffe, in Physical Acoustics, edited by, W. P. Mason, (Academic, New York, 1964), Vol. 1, part A.
9. A. Noeth, T. Yamada, V. O. Sherman, P. Muralt. A. K. Tagantsev, and N. Setter, J. Appl. Phys. 102, 114110 (2007). 10.1063/1.2822203
10. M. Aspelmeyer, U. Klemradt, W. Hartner, H. Bachhofer, and G. Schindler, J. Phys. D: Appl. Phys. 34, A173 (2001). 10.1088/0022-3727/34/10A/336
11. B. Jacobsen, Q.-Z. Yin, D. Tinker, C. E. Lesher, 37th Annual Lunar and Planetary Science Conf., abstract no. 2410 (2006).
12. A.-M. Azad and S. A. Akbar, Proc. of Optics East SPIE Conf. on Sensors for Harsh Environment, I. I. 5998, 1 (2005).
13. S. R. Skaggs, Zero and Low Coefficient of Thermal Expansion Polycrystalline Oxides (Los Alamos Scientific Laboratory, Los Alamos, 1977).
14. S. G. Alekseev, G. D. Mansfel'd, N. I. Polzikova, and I. M. Kotelyanskii, Acoust. Phys. 53, 465 (2007). 10.1134/S1063771007040069
15. J. Berge, A. Vorobiev, W. Steichen, and S. Gevorgian, IEEE Microwave Wireless Comp. Lett. 17, 655 (2007). 10.1109/LMWC.2007.903445