Virtual production lines design for back-end semiconductor manufacturing systems

IEEE Transactions on Semiconductor Manufacturing

Volumn 16, Issue 3, 2003, Pages 543-550

  Tang, Ying ^a   Zhou, MengChu ^b,c   Qiu, Robin G ^d  

^a Rowan University   (United States)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c INSTITUTE OF AUTOMATION   (China)

^d PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Heuristic algorithm; Manufacturing execution system; Production configuration; Virtual production line

Indexed keywords

ALGORITHMS; HEURISTIC METHODS; PRODUCTION ENGINEERING; VIRTUAL REALITY;

BACK END SEMICONDUCTOR MANUFACTURING SYSTEMS; HEURISTIC ALGORITHM; MANUFACTURING EXECUTION SYSTEMS; PRODUCTION CONFIGURATION; VIRTUAL PRODUCTION LINES DESIGN;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0042386739     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2003.815205     Document Type: Article

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