메뉴 건너뛰기




Volumn 37, Issue 4, 2007, Pages 504-516

Application of Petri nets and Lagrangian relaxation to scheduling automatic material-handling vehicles in 300-mm semiconductor manufacturing

Author keywords

300 mm semiconductor manufacturing; Automatic material handling system (AMHS); Lagrangian relaxation; Overhead hoist transport (OHT); Timed Petri nets (TPNs); Vehicle scheduling

Indexed keywords

AUTOMATIC MATERIAL-HANDLING SYSTEM; LAGRANGIAN RELAXATION; VEHICLE SCHEDULING;

EID: 34447329563     PISSN: 10946977     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSMCC.2007.897321     Document Type: Article
Times cited : (31)

References (19)
  • 1
    • 34447304548 scopus 로고    scopus 로고
    • Automated Material Handling System (AMHS) Framework User Requirements Document: Version 1.0. Int. SEMATECH, Austin, TX, 1999
    • Automated Material Handling System (AMHS) Framework User Requirements Document: Version 1.0. Int. SEMATECH, Austin, TX, 1999.
  • 2
    • 0016025814 scopus 로고
    • Validation and subgradient optimization
    • M. Held, P.Wolfe, and H. Crowder, "Validation and subgradient optimization," Math. Program., vol. 6, pp. 62-88, 1974.
    • (1974) Math. Program , vol.6 , pp. 62-88
    • Held, M.1    Wolfe, P.2    Crowder, H.3
  • 3
    • 34447300363 scopus 로고    scopus 로고
    • International technology roadmap for semiconductors, San Jose, CA, 2001, Online, Available
    • International technology roadmap for semiconductors, Semicond. Ind. Assoc. San Jose, CA, 2001, [Online]. Available: http://public.itrs.net.
    • Semicond. Ind. Assoc
  • 4
    • 0036351167 scopus 로고    scopus 로고
    • Modeling and performance evaluation of an overhead hoist transport system in a 300 mm fabrication plant
    • C.-H. Kuo, "Modeling and performance evaluation of an overhead hoist transport system in a 300 mm fabrication plant," Int. J. Adv. Manuf. Technol., vol. 20, pp. 153-161, 2002.
    • (2002) Int. J. Adv. Manuf. Technol , vol.20 , pp. 153-161
    • Kuo, C.-H.1
  • 6
    • 0028413979 scopus 로고
    • Scheduling flexible manufacturing systems using Petri nets and heuristic search
    • Apr
    • D. Y. Lee and F. DiCesare, "Scheduling flexible manufacturing systems using Petri nets and heuristic search," IEEE Trans. Robot. Autom. vol. 10, no. 2, pp. 123-132, Apr. 1994.
    • (1994) IEEE Trans. Robot. Autom , vol.10 , Issue.2 , pp. 123-132
    • Lee, D.Y.1    DiCesare, F.2
  • 7
    • 5144231627 scopus 로고    scopus 로고
    • A simulation-based, two-phase approach for dynamic OHT allocation and dispatching in large-scaled 300 mm AMHS management
    • Sep
    • D.-Y. Liao and H.-S. Fu, "A simulation-based, two-phase approach for dynamic OHT allocation and dispatching in large-scaled 300 mm AMHS management," IEEE Robot. Autom. Mag., vol. 11, no. 3, pp. 22-32, Sep. 2004.
    • (2004) IEEE Robot. Autom. Mag , vol.11 , Issue.3 , pp. 22-32
    • Liao, D.-Y.1    Fu, H.-S.2
  • 8
    • 15744401428 scopus 로고    scopus 로고
    • An optimal OHT dispatching system for 300-mm semiconductor manufacturing
    • Hague, The Netherlands, Oct. 10-13
    • C.-Y. Liu and D.-Y. Liao, "An optimal OHT dispatching system for 300-mm semiconductor manufacturing," in Proc. IEEE Int. Conf. Syst. Man Cybern., Hague, The Netherlands, Oct. 10-13, 2004, vol. 2, pp. 1631-1636.
    • (2004) Proc. IEEE Int. Conf. Syst. Man Cybern , vol.2 , pp. 1631-1636
    • Liu, C.-Y.1    Liao, D.-Y.2
  • 9
    • 0027625736 scopus 로고
    • Scheduling of manufacturing systems using the Lagrangian relaxation technique
    • Jul
    • P. B. Luh and D. J. Hoitomi, "Scheduling of manufacturing systems using the Lagrangian relaxation technique," IEEE Trans. Autom. Control, vol. 38, no. 7, pp. 1066-1079, Jul. 1993.
    • (1993) IEEE Trans. Autom. Control , vol.38 , Issue.7 , pp. 1066-1079
    • Luh, P.B.1    Hoitomi, D.J.2
  • 10
    • 0024645936 scopus 로고
    • Petri nets: Properties, analysis and applications
    • Apr
    • T. Murata, "Petri nets: Properties, analysis and applications," Proc. IEEE, vol. 77, no. 4, pp. 541-580, Apr. 1989.
    • (1989) Proc. IEEE , vol.77 , Issue.4 , pp. 541-580
    • Murata, T.1
  • 11
    • 0344033689 scopus 로고    scopus 로고
    • A distributed route planning method for multiple mobile robots using Lagrangian decomposition technique
    • Taipei, Taiwan, R.O.C, Sep. 14-19
    • T. Nishi, M. Ando, M. Konishi, and J. Imai, "A distributed route planning method for multiple mobile robots using Lagrangian decomposition technique," in Proc. IEEE Int. Conf. Robot. Autom., Taipei, Taiwan, R.O.C., Sep. 14-19, 2003, pp. 3855-3861.
    • (2003) Proc. IEEE Int. Conf. Robot. Autom , pp. 3855-3861
    • Nishi, T.1    Ando, M.2    Konishi, M.3    Imai, J.4
  • 13
    • 0034868181 scopus 로고    scopus 로고
    • A colored Petri net-based approach to the design of 300-mm wafer fab controllers
    • Seoul, Korea, May
    • J. Park, S. Reveliotis, D. Bodner, C. Zhou, and L. McGinnis, "A colored Petri net-based approach to the design of 300-mm wafer fab controllers," in Proc. IEEE Int. Conf. Robot. Autom., Seoul, Korea, May 2001, pp. 1813-1819.
    • (2001) Proc. IEEE Int. Conf. Robot. Autom , pp. 1813-1819
    • Park, J.1    Reveliotis, S.2    Bodner, D.3    Zhou, C.4    McGinnis, L.5
  • 14
    • 0034634803 scopus 로고    scopus 로고
    • Unidirectional circular layout for overhead material handling systems
    • J.-H. Ting and J. M. A. Tanchoco, "Unidirectional circular layout for overhead material handling systems," Int. J. Prod. Res., vol. 38, no. 16, pp. 3913-3935, 2000.
    • (2000) Int. J. Prod. Res , vol.38 , Issue.16 , pp. 3913-3935
    • Ting, J.-H.1    Tanchoco, J.M.A.2
  • 15
    • 0344444705 scopus 로고    scopus 로고
    • Effective OHT dispatching for differential material handling services in 300 mm wafer foundry
    • Taipei, Taiwan, R.O.C, Sep
    • C.-N. Wang and D.-Y. Liao, "Effective OHT dispatching for differential material handling services in 300 mm wafer foundry," in Proc. IEEE Int. Conf. Robot. Autom., Taipei, Taiwan, R.O.C., Sep. 2003, pp. 1027-1032.
    • (2003) Proc. IEEE Int. Conf. Robot. Autom , pp. 1027-1032
    • Wang, C.-N.1    Liao, D.-Y.2
  • 16
    • 0034867478 scopus 로고    scopus 로고
    • Resource-oriented Petri nets in deadlock avoidance of AGV systems
    • Seoul, Korea, May 21-26
    • N. Wu and M.-C. Zhou, "Resource-oriented Petri nets in deadlock avoidance of AGV systems," in Proc. IEEE Int. Conf. Robot. Autom. Seoul, Korea, May 21-26, 2001, pp. 64-69.
    • (2001) Proc. IEEE Int. Conf. Robot. Autom , pp. 64-69
    • Wu, N.1    Zhou, M.-C.2
  • 17
    • 0032141060 scopus 로고    scopus 로고
    • Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach
    • Aug
    • M.-C. Zhou and M.-D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach," IEEE Trans. Semicond. Manuf., vol. 11, no. 3, pp. 333-357, Aug. 1998.
    • (1998) IEEE Trans. Semicond. Manuf , vol.11 , Issue.3 , pp. 333-357
    • Zhou, M.-C.1    Jeng, M.-D.2
  • 19
    • 0031348492 scopus 로고    scopus 로고
    • The surrogate gradient algorithm for Lagrangian relaxation method
    • San Diego, CA, Dec
    • X. Zhao, P. B. Luh, and J. Wang, "The surrogate gradient algorithm for Lagrangian relaxation method," in Proc. 36th Conf. Decis. Control San Diego, CA, Dec. 1997, pp. 305-310.
    • (1997) Proc. 36th Conf. Decis. Control , pp. 305-310
    • Zhao, X.1    Luh, P.B.2    Wang, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.