A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems

IEEE Transactions on Automation Science and Engineering

Volumn 4, Issue 4, 2007, Pages 584-588

  Lee, Jin Shyan ^a   Zhou, MengChu ^b,c   Hsu, Pau Lo ^d  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c XIDIAN UNIVERSITY   (China)

^d NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Human in the loop; Modular supervision; Petri nets (PNs); Rapid thermal processes; Semiconductor manufacturing systems; Supervisory control

Indexed keywords

ERROR ANALYSIS; FAILURE ANALYSIS; LARGE SCALE SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE;

HUMAN-IN-THE-LOOP; MODULAR SUPERVISION; RAPID THERMAL PROCESSES; SEMICONDUCTOR MANUFACTURING SYSTEMS; SUPERVISORY CONTROLS;

PETRI NETS;

EID: 35348862663     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2007.905995     Document Type: Article

References (27)

1. A. Rovetta, R. Sala, X. Wen, and A. Togno, "Remote control in telerobotic surgery," IEEE Trans. Syst., Man, Cybern., Part A, vol. 26, no. 4, pp. 438-444, Jul. 1996.
2. A. Weaver, J. Luo, and X. Zhang, "Monitoring and control using the Internet and Java," in Proc. IEEE Int. Conf. Ind. Electron., San Jose, CA, 1999, pp. 1152-1158.
3. X. Feng, S. A. Velinsky, and D. Hong, "Integrating embedded PC and Internet technologies for real-time control and imaging," IEEE/ASME Trans. Mechatron., vol. 7, no. 1, pp. 52-60, Mar. 2002.
4. J. S. Lee and P. L. Hsu, "Design and implementation of the SNMP agents for remote monitoring and control via UML and Petri nets," IEEE Trans. Contr. Syst. Technol., vol. 12, no. 2, pp. 293-302, Mar. 2004.
5. J. S. Lee and P. L. Hsu, "Remote supervisory control of the human-in-the-loop system by using Petri nets and Java," IEEE Trans. Ind. Electron., vol. 50, no. 3, pp. 431-439, Jun. 2003.
6. M. Vineyard, K. Amoako-Gyampah, and J. R. Meredith, "Failure rate distributions for flexible manufacturing systems: An empirical study," Eur. J. Oper. Res., vol. 116, no. 1, pp. 139-155, 1999.
7. M. C. Zhou and M. D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach," IEEE Trans. Semiconduct. Manufact., vol. 11, no. 3, pp. 333-357, 1998.
8. A. Giua and F. DiCesare, "Petri net structural analysis for supervisory control," IEEE Trans. Robot. Automat., vol. 10, no. 2, pp. 185-195, 1994.
9. P. J. Ramadge and W. M. Wonham, "The control of discrete event systems," Proc. IEEE, vol. 77, no. 1, pp. 81-98, 1989.
10. C. A. Maziero, ARP: Petri Net Analyzer Control and Microinformatic Lab., Federal Univ. Santa Catarina, Santa Catarina, Brazil, 1990.
11. R. B. Fair, Rapid Thermal Processing: Science and Technology. New York: Academic, 1993.
12. M. V. Iordache, J. Moody, and P. J. Antsaklis, "Synthesis of deadlock prevention supervisors using Petri nets," IEEE Trans. Robot. Automat., vol. 18, no. 1, pp. 59-68, Feb. 2002.
13. Y. L. Chen, S. Lafortune, and F. Lin, "Design of nonblocking modular supervisors using event priority functions," IEEE Trans. Automat. Contr., vol. 45, no. 3, pp. 432-452, Mar. 2000.
14. K. Yamalidou, J. O. Moody, M. D. Lemmon, and P. J. Antsaklis, "Feedback control of Petri nets based on place invariants," Automatica, vol. 32, no. 1, pp. 15-28, 1996.
15. Z. W. Li and M. C. Zhou, "Elementary siphons of Petri nets and their application in deadlock prevention for flexible manufacturing systems," IEEE Trans. Syst., Man, Cybern., Part A, vol. 34, no. 1, pp. 38-51, Jan. 2004.
16. Z. W. Li and M. C. Zhou, "Correction to elementary siphons of Petri nets and their application in deadlock prevention for flexible manufacturing systems," IEEE Trans. Syst., Man, Cybern., Part A, vol. 34, no. 2, p. 289, Mar. 2004.
17. Z. W. Li and M. C. Zhou, "Two-stage method to design liveness-enforcing Petri net supervisor for FMS," IEEE Trans. Ind Inform., vol. 2, no. 4, pp. 313-325, Nov. 2006.
18. Z. W. Li and M. C. Zhou, "Clarifications on the definitions of elementary siphons of Petri nets," IEEE Trans. Syst., Man, Cybern., Part A: Syst. Humans, vol. 36, no. 6, pp. 1277-1279, Nov. 2006.
19. Z. W. Li, H. S. Hu, and A. R. Wang, "Design of liveness-enforcing supervisors for flexible manufacturing systems using Petri nets," IEEE Trans. Syst., Man, Cybern., Part C: Appl. Rev., vol. 37, no. 4, pp. 517-526, Jul. 2007.
20. Z. W. Li and M. C. Zhou, "A maximally permissive deadlock prevention policy for FMS based on Petri net siphon control and the theory of regions," IEEE Trans. Autom. Sci. Eng., 2007, to be published.
21. M. Uzam, "The use of Petri net reduction approach for an optimal deadlock prevention policy for flexible manufacturing systems," Int. J. Adv. Manufact. Technol., vol. 23, no. 3/4, pp. 204-219, Feb. 2004.
22. M. Uzam and M. C. Zhou, "An iterative synthesis approach to Petri net-based deadlock prevention policy for flexible manufacturing systems," IEEE Trans. Syst., Man, Cybern., Part A, vol. 37, no. 3, pp. 362-371, May 2007.
23. A. Ghaffari, T. N. Rezg, and X. Xie, "Design of a live and maximally permissive Petri net controller using the theory of regions," Trans. Robot. Autom., vol. 19, no. 1, pp. 137-141, Feb. 2003.
24. M. C. Zhou and M. P. Fanti, Eds., Deadlock Resolution in Computer-Integrated SystemsM. P. Fanti, Ed. New York: Marcel Dekker, Jan. 2005.
25. B. Hruz and M. C. Zhou, Modeling and Control of Discrete Event Dynamic Systems. London, U.K.: Springer-Verlag, Jul. 2007.
26. D. Y. Liao, M. D. Jeng, and M. C. Zhou, "Petri net modeling and Lagrangian relaxation approach to vehicle scheduling in 300 mm semiconductor manufacturing," IEEE Trans. Syst., Man, Cybern.: Part C, vol. 37, no. 4, pp. 504-516, Jul. 2007.
27. F. L. Lewis, Z. Kovacic, S. Bogdan, and J. Mireles, Manufacturing Systems Control Design: A. Matrix-Based Approach. New York: Springer-Verlag, 2006.