A methodology for the fabrication by FIB of needle-shape specimens around sub-surface features at the nanometre scale

Micron

Volumn 43, Issue 5, 2012, Pages 643-650

  Hernández Saz, Jesús ^a   Herrera, Miriam ^a   Molina, Sergio I ^a  

^a UNIVERSITY OF CÁDIZ   (Spain)

Author keywords

Electron tomography; Focused ion beam; Nano needle; Quantum dot; Semiconductors; Transmission electron microscopy

Indexed keywords

CONVENTIONAL TRANSMISSION ELECTRON MICROSCOPIES; ELECTRON TOMOGRAPHY; INAS/INP; NANOMETRES; NEEDLE SHAPE; NOVEL METHODOLOGY; SAMPLE SURFACE; SECONDARY ELECTRONS; SPECIFIC SITES; SUB-SURFACES; TRANSMISSION ELECTRON MICROSCOPY (TEM);

ELECTRIC IMPEDANCE TOMOGRAPHY; FABRICATION; FOCUSED ION BEAMS; SEMICONDUCTOR MATERIALS; SEMICONDUCTOR QUANTUM DOTS; TRANSMISSION ELECTRON MICROSCOPY;

NEEDLES;

EID: 84858154278     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2011.11.011     Document Type: Article

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