In situ lift-out using a FIB-SEM system

Micron

Volumn 35, Issue 7, 2004, Pages 607-611

  Langford, R M ^a   Clinton, C ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

FIB SEM; in situ lift out; TEM cross section

Indexed keywords

EID: 3042547419     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2004.03.002     Document Type: Article

References (4)

1. Giannuzzi L.A., Drown J.L., Brown S.R., Irwin R.B., Shofner T.L., Stevie F.A. Focused ion beam milling and micromanipulation lift-out for site specific cross-section TEM specimen preparation. Mater. Res. Symp. Proc. 480:1997;19
2. A new focused ion beam micro sampling technique for TEM observation. Hitachi Review, 2001 50(1-4).
3. Langford R.M., Petford-Long A.K. J. Vac. Sci. Technol. A. 19:(5):2001;2186-2193. Preparation of transmission electron microscopy cross-section specimens using focussed ion beam milling
4. De Veirman A.E.M. Mater. Sci. Eng. B. 102:(1-3):2003;63-69. 3-Dimensional TEM silicon-device analysis by combining plan-view and FIB sample preparation