Evaluation of top, angle, and side cleaned FIB samples for TEM analysis

Microscopy Research and Technique

Volumn 70, Issue 12, 2007, Pages 1060-1071

  Montoya, Eduardo ^a   Bals, Sara ^a   Rossell, Marta D ^a   Schryvers, Dominique ^a   Van Tendeloo, Gustaaf ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Double cross sectional TEM; FIB; HRTEM HAADF STEM; LaAlO3 SrTiO 3; Sputter coating; TEM sample preparation

Indexed keywords

AMORPHOUS MATERIALS; CLEANING; LANTHANUM COMPOUNDS; TITANIUM COMPOUNDS;

CROSS-SECTIONAL TEM; DOUBLE CROSS SECTIONAL TEM; FIB; HAADF-STEM; HRTEM/HAADF-STEM; LAALO3/SRTIO 3; SPUTTER COATING; SRTIO 3; TEM ANALYSIS; TEM SAMPLE PREPARATION;

ALUMINUM COMPOUNDS;

ARTICLE; CLEANING; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON MICROSCOPE; ENERGY FILTERED TRANSMISSION ELECTRON MICROSCOPY; EVALUATION; PRIORITY JOURNAL; SCANNING TRANSMISSION ELECTRON MICROSCOPY; TISSUE SECTION;

EID: 37149027550     PISSN: 1059910X     EISSN: 10970029     Source Type: Journal    
DOI: 10.1002/jemt.20514     Document Type: Article

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