SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

Parallel electron-beam-induced deposition using a multi-beam scanning electron microscope

(4) Post, P C a Mohammadi Gheidari, A a Hagen, C W a Kruit, P a

a DELFT UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRON BEAMS; LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAM-INDUCED DEPOSITION; MULTIBEAMS; SINGLE EXPOSURE;

ELECTRONS;

EID: 84255184060 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3656027 Document Type: Article

Times cited : (15)

References (26)

1
- 72849138014
- 10.1116/1.3253652
- J. K. W. Yang, B. Cord, H. Duan, K. K. Berggren, J. Klingfus, S. W. Nam, K. B. Kim, and M. J. Rooks, J. Vac. Sci. Technol. B 27, 2622 (2009). 10.1116/1.3253652
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 2622
- Yang, J.K.W.¹ Cord, B.² Duan, H.³ Berggren, K.K.⁴ Klingfus, J.⁵ Nam, S.W.⁶ Kim, K.B.⁷ Rooks, M.J.⁸

2
- 23144465269
- Approaching the resolution limit of nanometer-scale electron beam-induced deposition
- DOI 10.1021/nl050522i
- W. F. van Dorp, B. van Someren, C. W. Hagen, P. Kruit, and P. A. Crozier, Nano Lett. 5, 1303 (2005). 10.1021/nl050522i (Pubitemid 41084407)
- (2005) Nano Letters , vol.5 , Issue.7 , pp. 1303-1307
- Van Dorp, W.F.¹ Van Someren, B.² Hagen, C.W.³ Kruit, P.⁴ Crozier, P.A.⁵

3
- 85067737101
- (Elsevier, Amsterdam)
- N. Silvis-Cividjian and C. W. Hagen, Advances in Imaging and Electron Physics (Elsevier, Amsterdam, 2006), Vol. 43.
- (2006) Advances in Imaging and Electron Physics , vol.43
- Silvis-Cividjian, N.¹ Hagen, C.W.²

4
- 49049094436
- 10.1088/1468-6996/9/1/014110
- K. Furuya, Sci. Technol. Adv. Mater. 9, 014110 (2008). 10.1088/1468-6996/9/1/014110
- (2008) Sci. Technol. Adv. Mater. , vol.9 , pp. 014110
- Furuya, K.¹

5
- 49749114396
- 10.1116/1.2955728
- I. Utke, P. Hoffman, and J. Melngailis, J. Vac. Sci. Technol. B 26, 1197 (2008). 10.1116/1.2955728
- (2008) J. Vac. Sci. Technol. B , vol.26 , pp. 1197
- Utke, I.¹ Hoffman, P.² Melngailis, J.³

6
- 55249089714
- 10.1063/1.2977587
- W. F. van Dorp and C. W. Hagen, J. Appl. Phys. 104, 081301 (2008). 10.1063/1.2977587
- (2008) J. Appl. Phys. , vol.104 , pp. 081301
- Van Dorp, W.F.¹ Hagen, C.W.²

7
- 0021696411
- Feasibility of multi-beam electron lithography
- DOI 10.1016/0167-9317(84)90005-4
- B. Roelofs and J. Barth, Microelectron. Eng. 2, 259 (1984). 10.1016/0167-9317(84)90005-4 (Pubitemid 15586977)
- (1984) Microelectronic Engineering , vol.2 , Issue.4 , pp. 259-279
- Roelofs, B.J.G.M.¹ Barth, J.E.²

8
- 0000232063
- 10.1116/1.589232
- M. McCord, J. Vac. Sci. Technol. B 15, 2125 (1997). 10.1116/1.589232
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2125
- McCord, M.¹

9
- 0035450058
- 10.1016/S0167-9317(01)00528-7
- T. Chang, M. Mankos, K. Lee, and L. Muray, Microelectron. Eng. 57-58, 117 (2001). 10.1016/S0167-9317(01)00528-7
- (2001) Microelectron. Eng. , vol.57-58 , pp. 117
- Chang, T.¹ Mankos, M.² Lee, K.³ Muray, L.⁴

10
- 0034318648
- Advances in arrayed microcolumn lithography
- DOI 10.1116/1.1321760
- L. P. Muray, J. P. Spallas, C. Stebler, K. Lee, M. Mankos, Y. Hsu, M. Gmur, and T. H. P. Chang, J. Vac. Sci. Technol. B 18, 3099 (2000). 10.1116/1.1321760 (Pubitemid 32088165)
- (2000) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.18 , Issue.6 , pp. 3099-3104
- Muray, L.P.¹ Spallas, J.P.² Stebler, C.³ Lee, K.⁴ Mankos, M.⁵ Hsu, Y.⁶ Gmur, M.⁷ Chang, T.H.P.⁸

11
- 0001112962
- 10.1116/1.590458
- T. R. Groves and R. A. Kendall, J. Vac. Sci. Technol. B 16, 3168 (1998). 10.1116/1.590458
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3168
- Groves, T.R.¹ Kendall, R.A.²

12
- 3242723344
- 10.1116/1.1715014
- T. Haraguchi, T. Sakazaki, T. Satoh, M. Nakano, S. Hamaguchi, T. Kiuchi, H. Yabara, and H. Yasuda, J. Vac. Sci. Technol. B 22, 985 (2004). 10.1116/1.1715014
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 985
- Haraguchi, T.¹ Sakazaki, T.² Satoh, T.³ Nakano, M.⁴ Hamaguchi, S.⁵ Kiuchi, T.⁶ Yabara, H.⁷ Yasuda, H.⁸

13
- 0034315157
- Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system
- DOI 10.1116/1.1318187
- E. Yin, A. D. Brodie, F. C. Tsai, G. X. Guo, and N. W. Parker, J. Vac. Sci. Technol. B 18, 3126 (2000). 10.1116/1.1318187 (Pubitemid 32088170)
- (2000) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.18 , Issue.6 , pp. 3126-3131
- Yin, E.¹ Brodie, A.D.² Tsai, F.C.³ Guo, G.X.⁴ Parker, N.W.⁵

14
- 0348219411
- 10.1143/JJAP.42.6672
- S. Tanimoto, Y. Someda, M. Okumura, H. Ohta, Y. Sohda, and N. Saitou, Jpn. J. Appl. Phys., Part 1 42, 6672 (2003). 10.1143/JJAP.42.6672
- (2003) Jpn. J. Appl. Phys., Part 1 , vol.42 , pp. 6672
- Tanimoto, S.¹ Someda, Y.² Okumura, M.³ Ohta, H.⁴ Sohda, Y.⁵ Saitou, N.⁶

15
- 2342634505
- 10.1116/1.1645885
- S. T. Coyle, J. Vac. Sci. Technol. B 22, 501 (2004). 10.1116/1.1645885
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 501
- Coyle, S.T.¹

16
- 0001353675
- 10.1116/1.588673
- H. Yasuda, S. Arai, J.-I. Kai, Y. Ooae, T. Abe, S. Maruyama, and T. Kiuchi, J. Vac. Sci. Technol. B 14, 3813 (1996). 10.1116/1.588673
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 3813
- Yasuda, H.¹ Arai, S.² Kai, J.-I.³ Ooae, Y.⁴ Abe, T.⁵ Maruyama, S.⁶ Kiuchi, T.⁷

17
- 0034318562
- Demonstration of multiblanker electron-beam technology
- DOI 10.1116/1.1321757
- G. Winograd, V. Krishnamurthi, R. Garcia, L. H. Veneklasen, M. Mankos, and F. Pease, J. Vac. Sci. Technol. B 18, 3052 (2000). 10.1116/1.1321757 (Pubitemid 32088156)
- (2000) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.18 , Issue.6 , pp. 3052-3056
- Winograd, G.¹ Krishnamurthi, V.² Garcia, R.³ Veneklasen, L.H.⁴ Mankos, M.⁵ Pease, F.⁶

18
- 0034316532
- New concept for high-throughput multielectron beam direct write system
- DOI 10.1116/1.1320798
- M. Muraki and S. Gotoh, J. Vac. Sci. Technol. B 18, 3061 (2000). 10.1116/1.1320798 (Pubitemid 32088158)
- (2000) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.18 , Issue.6 , pp. 3061-3066
- Muraki, M.¹ Gotoh, S.²

19
- 31844447796
- Feasibility study of multiple-beam scanning electron microscopy for defect inspection
- DOI 10.1143/JJAP.44.5570
- N. Nakasuji, S. Yoshikawa, T. Satake, and N. Noji, Jpn. J. Appl. Phys., Part 1 44, 5570 (2005). 10.1143/JJAP.44.5570 (Pubitemid 43182960)
- (2005) Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers , vol.44 , Issue.7 , pp. 5570-5574
- Nakasuji, M.¹ Yoshikawa, S.² Satake, T.³ Noji, N.⁴

20
- 34047153464
- Optical properties of a multibeam column with a single-electron source
- DOI 10.1116/1.2429674
- O. Kamimura, J. Vac. Sci. Technol. B 25, 140 (2007). 10.1116/1.2429674 (Pubitemid 46512016)
- (2007) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.25 , Issue.1 , pp. 140-146
- Kamimura, O.¹ Tanimoto, S.² Ohta, H.³ Nakayama, Y.⁴ Sakakibara, M.⁵ Sohda, Y.⁶ Muraki, M.⁷ Gotoh, S.⁸ Hosoda, M.⁹ Someda, Y.¹⁰ Tamamori, K.¹¹ Hirose, F.¹² Nagae, K.¹³ Kato, K.¹⁴ Okunuki, M.¹⁵

21
- 53349090022
- 10.1063/1.2992193
- J. Basu, C. B. Carter, R. Divakar, V. B. Shenoy, and N. Ravishankar, Appl. Phys. Lett. 93, 133104 (2008). 10.1063/1.2992193
- (2008) Appl. Phys. Lett. , vol.93 , pp. 133104
- Basu, J.¹ Carter, C.B.² Divakar, R.³ Shenoy, V.B.⁴ Ravishankar, N.⁵

22
- 72849138259
- 10.1116/1.3250262
- H. M. Kim, M. H. Lee, H. S. Lee, J. S. Wi, K. Lim, and K. B. Kim, J. Vac. Sci. Technol. B 27, 2553 (2009). 10.1116/1.3250262
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 2553
- Kim, H.M.¹ Lee, M.H.² Lee, H.S.³ Wi, J.S.⁴ Lim, K.⁵ Kim, K.B.⁶

23
- 65249145132
- 10.1063/1.1504486
- L. Dong, F. Arai, and T. Fukuda, Appl. Phys. Lett. 81, 1919 (2002). 10.1063/1.1504486
- (2002) Appl. Phys. Lett. , vol.81 , pp. 1919
- Dong, L.¹ Arai, F.² Fukuda, T.³

24
- 78650117188
- 10.1116/1.3498749
- A. Mohammadi-Gheidari, C. W. Hagen, and P. Kruit, J. Vac. Sci. Technol. B 28, C6G5 (2010). 10.1116/1.3498749
- (2010) J. Vac. Sci. Technol. B , vol.28
- Mohammadi-Gheidari, A.¹ Hagen, C.W.² Kruit, P.³

25
- 79958220280
- 10.1016/j.nima.2010.12.090
- A. Mohammadi-Gheidari and P. Kruit, Nucl. Instrum. Methods Phys. Res. A 645, 60 (2011). 10.1016/j.nima.2010.12.090
- (2011) Nucl. Instrum. Methods Phys. Res. A , vol.645 , pp. 60
- Mohammadi-Gheidari, A.¹ Kruit, P.²

26
- 54149085000
- 10.1016/j.phpro.2008.07.138
- Y. Zhang and P. Kruit, Phys. Procedia 1, 553 (2008). 10.1016/j.phpro. 2008.07.138
- (2008) Phys. Procedia , vol.1 , pp. 553
- Zhang, Y.¹ Kruit, P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.