Modified electron-beam-induced deposition of metal nanostructure arrays using a parallel electron beam

Applied Physics Letters

Volumn 93, Issue 13, 2008, Pages

  Basu, Joysurya ^a   Barry Carter, C ^a   Divakar, R ^b   Shenoy, Vijay B ^c   Ravishankar, N ^c  

^a UNIVERSITY OF CONNECTICUT   (United States)

^b INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

^c INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRON BEAMS; ELECTRON GUNS; PARTICLE BEAMS; VAPORS;

ELECTRON-BEAM-INDUCED DEPOSITION; FEATURE SIZES; INSULATING SURFACES; METAL NANO STRUCTURES; METAL VAPORS; PROBE SIZE; SHARP EDGES; SITE-SPECIFIC;

ELECTRONS;

EID: 53349090022     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2992193     Document Type: Article

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