Multielectron beam blanking aperture array system SYNAPSE-2000

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3813-3820

  Yasuda, Hiroshi ^a   Arai, Soichiro ^a   Kai, Jun Ichi ^a   Ooae, Yoshihisa ^a   Abe, Tomohiko ^a   Maruyama, Shiqeru ^a   Kiuchi, Takashi ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001353675     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588673     Document Type: Article

References (9)

1. K. Sakamoto, S. Fueki, S. Yamazaki, T. Abe, K. Kobayashi, H. Nishino, T. Satoh, A. Takemoto, A. Ookura, M. Oono, S. Sago, Y. Ooae, A. Yamada, and H. Yasuda, J. Vac. Sci. Technol. B 11, 2357 (1993).
2. M. Kawano, K. Mizuno, H. Yoda, and Y. Sakitani, J. Vac. Sci. Technol. B 11, 2323 (1993).
3. K. Hattori, R. Yoshikawa, H. Wada, H. Kusakabe, T. Yamaguchi, S. Magoshi, A. Miyagaki, S. Yamasaki, T. Takigawa, M. Kanoh, S. Nishimura, H. Housai, and S. Hashimoto, J. Vac. Sci. Technol. B 11, 2346 (1993).
4. T. H. P. Chang and D. P. Kern, J. Vac. Sci. Technol. B 10, 2776 (1992).
5. G. W. Jones, S. K. Jones, M. Walters, and B. Dudley, J. Vac. Sci. Technol. B 6, 2023 (1988).
6. H. C. Pfeiffer, IEEE Trans. Electron Devices ED-26, 663 (1979).
7. B. Lishke, W. Bennecke, M. Brunner, K. H. Herrman, A. Heuberger, E. Knapek, P. Schaffer, and U. Schnakenberg, Proc. 1989 Int. MicroProc Conf, JJAP Series 3 (1990), p. 47.
8. H. Yasuda, S. Arai, J. Kai, Y. Ooae, T. Abe, Y. Takahashi, S. Fueki, S. Maruyama, S. Sago, and K. Betsui, JJAP 32, 6012 (1993).
9. Y. Takahashi, A. Yamada, Y. Oae, H. Yasuda, and K. Kawashima, J. Vac. Sci. Technol. B 10, 2794 (1992).