Multicolumn cell: Evaluation of the proof of concept system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 3, 2004, Pages 985-988

  Haraguchi, T ^a   Sakazaki, T ^a   Satoh, T ^a   Nakano, M ^a   Hamaguchi, S ^a   Kiuchi, T ^a   Yabara, H ^a   Yasuda, H ^a  

^a ADVANTEST CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; ELECTRIC POTENTIAL; ELECTRON BEAMS; ERROR ANALYSIS; INTEGRATED CIRCUIT MANUFACTURE; LENSES; MOTION CONTROL; PLASMA GUNS; PROBLEM SOLVING; WAVE INTERFERENCE;

ELECTRON BEAM DIRECT WRITING (EBDW); MULTICOLUMN CELL (MCC); PROOF OF CONCEPT (POC); VECTOR SCAN BEAMS;

ELECTRON OPTICS;

EID: 3242723344     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1715014     Document Type: Article

References (4)

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3. T. Haraguchi et al., J. Vac. Sci. Technol. B 20, 2726 (2002).
4. H. Yasuda et al., Jpn. J. Appl. Phys., Part 1 5, 133 (1992).