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Journal of Vacuum Science and Technology B

Volumn 28, Issue 6, 2010, Pages

Multibeam scanning electron microscope: Experimental results

(3) Mohammadi Gheidari, A a Hagen, C W a Kruit, P a

a DELFT UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

SCANNING;

BEAM SOURCES; BEAM-SCANNING; BEAMLETS; FOCUSED BEAMS; MICROSCOPE OPTICS; MULTI-ELECTRON; MULTIBEAM SOURCES; MULTIBEAMS; SCANNING ELECTRONS; SINGLE-BEAM;

SCANNING ELECTRON MICROSCOPY;

EID: 78650117188 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3498749 Document Type: Article

Times cited : (23)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.