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Volumn 18, Issue 6, 2000, Pages 3061-3066
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New concept for high-throughput multielectron beam direct write system
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
MICROELECTROMECHANICAL DEVICES;
MICROOPTICS;
OPTICAL INSTRUMENT LENSES;
OPTICAL SYSTEMS;
SILICON WAFERS;
CORRECTION LENS ARRAY (CLA);
MULTIELECTRON BEAM DIRECT WRITE (MEBDW) SYSTEMS;
ELECTRON BEAM LITHOGRAPHY;
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EID: 0034316532
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1320798 Document Type: Article |
Times cited : (40)
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References (10)
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