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Volumn 18, Issue 6, 2000, Pages 3061-3066

New concept for high-throughput multielectron beam direct write system

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; OPTICAL SYSTEMS; SILICON WAFERS;

EID: 0034316532     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1320798     Document Type: Article
Times cited : (40)

References (10)
  • 9
    • 0342552507 scopus 로고    scopus 로고
    • Munro's Electron Beam Software Ltd., London, England
    • Munro's Electron Beam Software Ltd., London, England.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.