Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3126-3131

  Yin, E ^a   Brodie, A D ^a   Tsai, F C ^a   Guo, G X ^a   Parker, N W ^a  

^a Ion Diagnostics Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SPACE CHARGE; ELECTRON GUNS; IONS; OPTICAL INSTRUMENT LENSES; OPTIMIZATION;

DEFLECTORS; ION DIAGNOSTICS;

ELECTRON BEAM LITHOGRAPHY;

EID: 0034315157     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1318187     Document Type: Article

References (10)

1. T. H. P. Chang, D. P. Kern, and L. P. Muray, J. Vac. Sci. Technol. B 10, 2743 (1992).
2. T. R. Groves and R. A. Kendall, J. Vac. Sci. Technol. B 16, 3168 (1998).
3. H. Yasuda et al., J. Vac. Sci. Technol. B 14, 3813 (1996).
4. J. E. Schneider et al., J. Vac. Sci. Technol. B 16, 3192 (1998).
5. G. I. Winograd, W. D. Meisburger, and R. F. W. Pease, J. Vac. Sci. Technol. B 17, 2803 (1999).
6. N. W. Parker, A. D. Brodie, and J. H. McCoy, Proc. SPIE 3997, 713 (2000).
7. P. R. Schwoebel, R. T. Olson, J. A. Panitz, and A. D. Brodie, J. Vac. Sci. Technol. (to be published).
8. X.-R. Jiang and Z.-F. Na, J. Vac. Sci. Technol. B 5, 156 (1987).
9. Optics program, Ver. 1.4, Munro's Electron Beam Software Ltd.
10. SIMION 3D, Ver. 6.0, written by Dr. David Dahl, distributed by Ion Source Software.