Method of improving the quality of nanopatterning in atomic image projection electron-beam lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2553-2557

  Kim, Hyun Mi ^a   Lee, Min Hyun ^a   Lee, Hyo Sung ^a   Wi, Jung Sub ^a   Lim, Kipil ^a   Kim, Ki Bum ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONVENTIONAL TEM; HIGH RESOLUTION; IMAGE PROJECTION; LATTICE IMAGES; NANOPATTERNING; NOISE REDUCTIONS; NOISE SIGNALS; TEM; ZONE AXIS;

ACOUSTIC NOISE; ACOUSTIC NOISE MEASUREMENT;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 72849138259     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3250262     Document Type: Conference Paper

References (8)

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