Modelling of a large scale reactor for plasma deposition of silicon

Plasma Sources Science and Technology

Volumn 8, Issue 2, 1999, Pages 295-298

  Nienhuis, Gert Jan ^a   Goedheer, Wim ^a  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC DISCHARGES; FUNCTIONS; HYDROGEN; MATHEMATICAL MODELS; PLASMA INTERACTIONS; SILANES;

BOLTZMANN EQUATION; ELECTRON ENERGY DISTRIBUTION; PLASMA DISCHARGES; SURFACE REACTION COEFFICIENTS;

PLASMAS;

EID: 0032631356     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/2/310     Document Type: Article

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