Two-dimensional fluid model of an inductively coupled plasma with comparison to experimental spatial profiles

Journal of Applied Physics

Volumn 80, Issue 5, 1996, Pages 2614-2623

  Bukowski, J D ^a   Graves, D B ^a   Vitello, P ^b  

^a University of California   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHLORINE; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRONS; ENERGY TRANSFER; EQUATIONS OF MOTION; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PLASMA DENSITY;

COLLISIONAL MOMENTUM TRANSFER; ELECTRON ENERGY DISTRIBUTION; ELECTRON NEUTRAL COLLISIONS; ELECTRON TEMPERATURE; INDUCTIVELY COUPLED PLASMA; PLASMA POTENTIAL;

PLASMAS;

EID: 0030242452     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363169     Document Type: Review

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