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Volumn 14, Issue 1-2, 2011, Pages 20-33

Silsesquioxanes in nanoscale patterning applications

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CHEMICAL STABILITY; FUNCTIONAL MATERIALS; LITHOGRAPHY; NANOTECHNOLOGY;

EID: 79952028160     PISSN: 13697021     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-7021(11)70019-0     Document Type: Review
Times cited : (34)

References (74)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.