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Volumn 14, Issue 1-2, 2011, Pages 20-33
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Silsesquioxanes in nanoscale patterning applications
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Author keywords
[No Author keywords available]
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Indexed keywords
CERAMIC MATERIALS;
CHEMICAL STABILITY;
FUNCTIONAL MATERIALS;
LITHOGRAPHY;
NANOTECHNOLOGY;
FUNCTIONAL PROPERTIES;
INORGANIC-ORGANIC HYBRID MATERIALS;
MECHANICAL AND PHYSICAL PROPERTIES;
NANOSCALE PATTERNING;
SILSESQUIOXANES;
SOFT MATERIAL;
SOLUTION-PROCESSING;
TECHNICAL APPLICATIONS;
HYBRID MATERIALS;
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EID: 79952028160
PISSN: 13697021
EISSN: None
Source Type: Journal
DOI: 10.1016/S1369-7021(11)70019-0 Document Type: Review |
Times cited : (34)
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References (74)
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