SCOPUS 정보 검색 플랫폼

Angewandte Chemie - International Edition

Volumn 48, Issue 1, 2009, Pages 144-148

Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks

(4) George, Matthew C a Nelson, Erik C a Rogers, John A a Braun, Paul V a

a University of Illinois at Urbana Champaign (United States)

Author keywords

Nanoimprinting; Nanolithography; Photochemistry; Silsesquioxanes

Indexed keywords

FABRICATION; MASKS; MICROSTRUCTURE; NANOLITHOGRAPHY;

3D MICROSTRUCTURES; COLLOIDAL PARTICLES; DIRECT FABRICATIONS; END GROUPS; EXPOSURE CONDITIONS; MASK DESIGNS; MASK LESS; METHYL SILSESQUIOXANE; NANOIMPRINTING; NANOPATTERNING; PHASE MASKS; PHOTOCHEMISTRY; SILANOL; SILSESQUIOXANES;

PHOTONIC CRYSTALS;

INORGANIC COMPOUND;

ARTICLE; CHEMISTRY; CONFORMATION; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL IMAGING; X RAY DIFFRACTION;

IMAGING, THREE-DIMENSIONAL; INORGANIC CHEMICALS; MICROSCOPY, ELECTRON, SCANNING; MOLECULAR CONFORMATION; X-RAY DIFFRACTION;

ACIDS; ASSEMBLY; COLLOIDS; CONDENSATION; LITHOGRAPHY; MICROSTRUCTURE; PHOTOCHEMISTRY;

EID: 58249100129 PISSN: 14337851 EISSN: None Source Type: Journal
DOI: 10.1002/anie.200804171 Document Type: Article

Times cited : (23)

References (42)

1
- 33749522165
- E. Yablonovitch, J. Mod. Opt. 1994, 41, 173.
- (1994) J. Mod. Opt , vol.41 , pp. 173
- Yablonovitch, E.¹

2
- 0038545277
- D. Therriault, S. R. White, J. A. Lewis, Nat. Mater. 2003, 2, 265.
- (2003) Nat. Mater , vol.2 , pp. 265
- Therriault, D.¹ White, S.R.² Lewis, J.A.³

3
- 23144435507
- S. Jeon, V. Malyarchuk, J. O. White, J. A. Rogers, Nano Lett. 2005, 5, 1351.
- (2005) Nano Lett , vol.5 , pp. 1351
- Jeon, S.¹ Malyarchuk, V.² White, J.O.³ Rogers, J.A.⁴

4
- 42549137976
- A. delCampo, E. Arzt, Chem. Rev. 2008, 108, 911.
- (2008) Chem. Rev , vol.108 , pp. 911
- delCampo, A.¹ Arzt, E.²

5
- 58249098355
- E. Fabrizio, F. Perennes, F. Romanato, S. Cabrini, D. Cojoc, M. Tormen, L. Businaro, L. Vaccari, R. Proietti, R. Kumar, BioMEMS Nanotechnol. 2006, p. 97.
- (2006) BioMEMS Nanotechnol , pp. 97
- Fabrizio, E.¹ Perennes, F.² Romanato, F.³ Cabrini, S.⁴ Cojoc, D.⁵ Tormen, M.⁶ Businaro, L.⁷ Vaccari, L.⁸ Proietti, R.⁹ Kumar, R.¹⁰

6
- 40549116006
- X. Hu, G. Li, M. Li, J. Huang, Y. Li, Y. Gao, Y. Zhang, Adv. Funct. Mater. 2008, 18, 575.
- (2008) Adv. Funct. Mater , vol.18 , pp. 575
- Hu, X.¹ Li, G.² Li, M.³ Huang, J.⁴ Li, Y.⁵ Gao, Y.⁶ Zhang, Y.⁷

7
- 0031259910
- J. H. Holtz, S. A. Asher, Nature 1997, 389, 829.
- (1997) Nature , vol.389 , pp. 829
- Holtz, J.H.¹ Asher, S.A.²

8
- 7644220430
- J. W. Long, B. Dunn, D. R. Rolison, H. S. White, Chem. Rev. 2004, 104, 4463.
- (2004) Chem. Rev , vol.104 , pp. 4463
- Long, J.W.¹ Dunn, B.² Rolison, D.R.³ White, H.S.⁴

9
- 46349092457
- L. Dhar, K. Curtis, T. Facke, Nat. Photonics 2008, 2, 403.
- (2008) Nat. Photonics , vol.2 , pp. 403
- Dhar, L.¹ Curtis, K.² Facke, T.³

10
- 37049186161
- D. A. Parthenopoulos, P. M. Rentzepis, Science 1989, 245, 843.
- (1989) Science , vol.245 , pp. 843
- Parthenopoulos, D.A.¹ Rentzepis, P.M.²

11
- 33747764942
- M. L. K. Hoa, M. Lu, Y. Zhang, Adv. Colloid Interface Sci. 2006, 121, 9.
- (2006) Adv. Colloid Interface Sci , vol.121 , pp. 9
- Hoa, M.L.K.¹ Lu, M.² Zhang, Y.³

12
- 0032621682
- S. Noda, N. Yamamoto, H. Kobayashi, M. Okano, K. Tomoda, Appl. Phys. Lett. 1999, 75, 905.
- (1999) Appl. Phys. Lett , vol.75 , pp. 905
- Noda, S.¹ Yamamoto, N.² Kobayashi, H.³ Okano, M.⁴ Tomoda, K.⁵

13
- 21244449984
- P. Yao, G. Schneider, D. Prather, E. Wetzel, D. O'Brien, Opt. Express 2005, 13, 2370.
- (2005) Opt. Express , vol.13 , pp. 2370
- Yao, P.¹ Schneider, G.² Prather, D.³ Wetzel, E.⁴ O'Brien, D.⁵

14
- 0141461371
- J. Zaumseil, M. A. Meitl, J. W. P. Hsu, B. R. Acharya, K. W. Baldwin, Y. L. Loo, J. A. Rogers, Nano Lett. 2003, 3, 1223.
- (2003) Nano Lett , vol.3 , pp. 1223
- Zaumseil, J.¹ Meitl, M.A.² Hsu, J.W.P.³ Acharya, B.R.⁴ Baldwin, K.W.⁵ Loo, Y.L.⁶ Rogers, J.A.⁷

15
- 0029323532
- P. Dario, M. C. Carrozza, N. Croce, M. C. Montesi, M. Cocco, J. Micromech. Microeng. 1995, 5, 64.
- (1995) J. Micromech. Microeng , vol.5 , pp. 64
- Dario, P.¹ Carrozza, M.C.² Croce, N.³ Montesi, M.C.⁴ Cocco, M.⁵

16
- 0000469932
- G. Witzgall, R. Vrijen, E. Yablonovitch, V. Doan, B. J. Schwartz, Opt. Lett. 1998, 23, 1745.
- (1998) Opt. Lett , vol.23 , pp. 1745
- Witzgall, G.¹ Vrijen, R.² Yablonovitch, E.³ Doan, V.⁴ Schwartz, B.J.⁵

17
- 0037120343
- J. E. Smay, G. M. Gratson, R. F. Shepherd, J. Cesarano, J. A. Lewis, Adv. Mater. 2002, 14, 1279.
- (2002) Adv. Mater , vol.14 , pp. 1279
- Smay, J.E.¹ Gratson, G.M.² Shepherd, R.F.³ Cesarano, J.⁴ Lewis, J.A.⁵

18
- 36249004357
- E. B. Duoss, M. Twardowski, J. A. Lewis, Adv. Mater. 2007, 19, 3485.
- (2007) Adv. Mater , vol.19 , pp. 3485
- Duoss, E.B.¹ Twardowski, M.² Lewis, J.A.³

19
- 33644910927
- J. H. Moon, J. Ford, S. Yang, Polym. Adv. Technol. 2006, 17, 83.
- (2006) Polym. Adv. Technol , vol.17 , pp. 83
- Moon, J.H.¹ Ford, J.² Yang, S.³

20
- 0000122657
- A. J. Turberfield, MRS Bull. 2001, 26, 632.
- (2001) MRS Bull , vol.26 , pp. 632
- Turberfield, A.J.¹

21
- 34248536320
- S. Jeon, D. J. Shir, Y. S. Nam, R. Nidetz, M. Highland, D. G. Cahill, J. A. Rogers,M. F. Su, I. F. El-Kady, C. G. Christodoulou, G. R. Bogart, Opt. Express 2007, 15, 6358.
- (2007) Opt. Express , vol.15 , pp. 6358
- Jeon, S.¹ Shir, D.J.² Nam, Y.S.³ Nidetz, R.⁴ Highland, M.⁵ Cahill, D.G.⁶ Rogers, J.A.⁷ Su, M.F.⁸ El-Kady, I.F.⁹ Christodoulou, C.G.¹⁰ Bogart, G.R.¹¹

22
- 53549121127
- J.-H. Jang, D. Dendukuri, T. A. Hatton, E. L. Thomas, P. S. Doyle, Angew. Chem. 2007, 119, 9185;
- (2007) Angew. Chem , vol.119 , pp. 9185
- Jang, J.-H.¹ Dendukuri, D.² Hatton, T.A.³ Thomas, E.L.⁴ Doyle, P.S.⁵

23
- 36849017064
- Angew. Chem. Int. Ed. 2007, 46, 9027.
- (2007) Angew. Chem. Int. Ed , vol.46 , pp. 9027

24
- 33645067652
- S. Jeon, V. Malyarchuk, J. A. Rogers, G. P. Wiederrecht, Opt. Express 2006, 14, 2300.
- (2006) Opt. Express , vol.14 , pp. 2300
- Jeon, S.¹ Malyarchuk, V.² Rogers, J.A.³ Wiederrecht, G.P.⁴

25
- 33745577245
- J. Scrimgeour, D. N. Sharp, C. F. Blanford, O. M. Roche, R. G. Denning, A. J. Turberfield, Adv. Mater. 2006, 18, 1557.
- (2006) Adv. Mater , vol.18 , pp. 1557
- Scrimgeour, J.¹ Sharp, D.N.² Blanford, C.F.³ Roche, O.M.⁴ Denning, R.G.⁵ Turberfield, A.J.⁶

26
- 33745545894
- J. S. King, E. Graugnard, O. M. Roche, D. N. Sharp, J. Scrimgeour, R. G. Denning, A. J. Turberfield, C. J. Summers, Adv. Mater. 2006, 18, 1561.
- (2006) Adv. Mater , vol.18 , pp. 1561
- King, J.S.¹ Graugnard, E.² Roche, O.M.³ Sharp, D.N.⁴ Scrimgeour, J.⁵ Denning, R.G.⁶ Turberfield, A.J.⁷ Summers, C.J.⁸

27
- 43049141486
- V. Ramanan, E. Nelson, A. Brzezinski, P. V. Braun, P. Wiltzius, Appl. Phys. Lett. 2008, 92, 173304.
- (2008) Appl. Phys. Lett , vol.92 , pp. 173304
- Ramanan, V.¹ Nelson, E.² Brzezinski, A.³ Braun, P.V.⁴ Wiltzius, P.⁵

28
- 23744444689
- Y. Jun, C. A. Leatherdale, D. J. Norris, Adv. Mater. 2005, 17, 1908.
- (2005) Adv. Mater , vol.17 , pp. 1908
- Jun, Y.¹ Leatherdale, C.A.² Norris, D.J.³

29
- 54949129140
- Y. Jun, P. Nagpal, D. J. Norris, Adv. Mater. 2008, 20, 606.
- (2008) Adv. Mater , vol.20 , pp. 606
- Jun, Y.¹ Nagpal, P.² Norris, D.J.³

30
- 0000134457
- 1st ed, SPIE, San Jose, CA
- D. R. McKean, N. J. Clecak, L. A. Pederson, Advances in Resist Technology and Processing VII, Vol. 1262, 1st ed., SPIE, San Jose, CA, 1990, p. 110.
- (1990) Advances in Resist Technology and Processing VII , vol.1262 , pp. 110
- McKean, D.R.¹ Clecak, N.J.² Pederson, L.A.³

31
- 0026122125
- H. Watanabe, Y. Todokoro, M. Inoue, Microelectron. Eng. 1991, 13, 69.
- (1991) Microelectron. Eng , vol.13 , pp. 69
- Watanabe, H.¹ Todokoro, Y.² Inoue, M.³

32
- 0001669686
- K. D. Belfield, K. J. Schafer, Y. Liu, J. Liu, X. Ren, E. W. Van Stryland, J. Phys. Org. Chem. 2000, 13, 837.
- (2000) J. Phys. Org. Chem , vol.13 , pp. 837
- Belfield, K.D.¹ Schafer, K.J.² Liu, Y.³ Liu, J.⁴ Ren, X.⁵ Van Stryland, E.W.⁶

33
- 0000810896
- Y. Boiko, J. Costa, M. M. Wang, S. Esener, Opt. Express 2001, 8, 571.
- (2001) Opt. Express , vol.8 , pp. 571
- Boiko, Y.¹ Costa, J.² Wang, M.M.³ Esener, S.⁴

34
- 58249105693
- Masters thesis, Georgia Institute of Technology Atlanta
- M. G. Cupta, Masters thesis, Georgia Institute of Technology (Atlanta), 2006.
- (2006)
- Cupta, M.G.¹

35
- 0000913880
- X. Shi, J. Vac. Sci. Technol. B 1999, 17, 350.
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 350
- Shi, X.¹

36
- 4344674672
- S. Jeon, J.-U. Park, R. Cirelli, S. Yang, C. E. Heitzman, P. V. Braun, P. J. A. Kenis, J. A. Rogers, Proc. Natl. Acad. Sci. USA 2004, 101, 12428.
- (2004) Proc. Natl. Acad. Sci. USA , vol.101 , pp. 12428
- Jeon, S.¹ Park, J.-U.² Cirelli, R.³ Yang, S.⁴ Heitzman, C.E.⁵ Braun, P.V.⁶ Kenis, P.J.A.⁷ Rogers, J.A.⁸

37
- 58249106698
- K. Toshiaki, J. Saulius, M. Vygantas, M. Shigeki, M. Hiroaki, New J. Phys. 2006, 9, 250.
- (2006) New J. Phys , vol.9 , pp. 250
- Toshiaki, K.¹ Saulius, J.² Vygantas, M.³ Shigeki, M.⁴ Hiroaki, M.⁵

38
- 33646384385
- T. Y. M. Chan, O. Toader, S. John, Phys. Rev. E 2006, 73, 046610.
- (2006) Phys. Rev. E , vol.73 , pp. 046610
- Chan, T.Y.M.¹ Toader, O.² John, S.³

39
- 0344561029
- K. Busch, S. John, Phys. Rev. E 1998, 58, 3896.
- (1998) Phys. Rev. E , vol.58 , pp. 3896
- Busch, K.¹ John, S.²

40
- 38549143172
- J. W. Rinne, S. Gupta, P. Wiltzius, Opt. Express 2008, 16, 663.
- (2008) Opt. Express , vol.16 , pp. 663
- Rinne, J.W.¹ Gupta, S.² Wiltzius, P.³

41
- 0001320404
- R2006
- A. Chutinan, S. Noda, Phys. Rev. B 1998, 57, R2006.
- (1998) Phys. Rev. B , vol.57
- Chutinan, A.¹ Noda, S.²

42
- 34648837354
- M. Thiel, M. Hermatschweiler, M. Wegener, G. von Freymann, Appl. Phys. Lett. 2007, 91, 123515.
- (2007) Appl. Phys. Lett , vol.91 , pp. 123515
- Thiel, M.¹ Hermatschweiler, M.² Wegener, M.³ von Freymann, G.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.