Low-dielectric, nanoporous organosilicate films prepared via inorganic/organic polymer hybrid templates

Chemistry of Materials

Volumn 11, Issue 11, 1999, Pages 3080-3085

  Nguyen, Cattien V ^a   Carter, Kenneth R ^a   Hawker, Craig J ^a   Hedrick, James L ^a   Jaffe, Richard L ^a   Miller, Robert D ^a   Remenar, Julius F ^a   Rhee, Hee Woo ^a   Rice, Philip M ^a   Toney, Michael F ^a   Trollsås, Mikael ^a   Yoon, Do Y ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001088013     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm990114d     Document Type: Article

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