High-modulus spin-on organosilicate glasses for nanoporous applications

Advanced Materials

Volumn 19, Issue 5, 2007, Pages 705-710

  Ro, Hyun Wook ^a,b   Char, Kookheon ^b   Jeon, Eun Chae ^b   Kim, Hie Joon ^b   Kwon, Dongil ^b   Lee, Hae Jeong ^a   Lee, Jin Kyu ^b   Rhee, Hee Woo ^c   Soles, Christopher L ^a   Yoon, Do Y ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Seoul National University   (South Korea)

^c Sogang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST SUPPORTS; CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; OPTICAL WAVEGUIDES; ORGANOMETALLICS; SILICATES;

CHEMICAL-MECHANICAL PLANARIZATION (CPM) PROCESSES; MODULUS SPIN; OREGANOSILICATE GLASSES;

GLASS;

EID: 34250648953     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200601528     Document Type: Article

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