Cubic silsesquioxanes as a green, high-performance mold material for nanoimprint lithography

Advanced Materials

Volumn 23, Issue 3, 2011, Pages 414-420

  Ro, Hyun Wook ^a   Popova, Vera ^b   Chen, Lei ^a   Forster, Aaron M ^a   Ding, Yifu ^a   Alvine, Kyle J ^a   Krug, Dave J ^b   Laine, Richard M ^c   Soles, Christopher L ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Mayaterials Inc   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

nanoimprint lithography; organosilicates; secondary mold; silsesquioxane; X ray reflectivity

Indexed keywords

AFM; LOW SURFACE ENERGY; MOLD MATERIALS; NANO-IMPRINTING; ORGANOSILICATES; PATTERN FIDELITY; SECONDARY MOLD; SILSESQUIOXANES; THERMALLY STABLE; X RAY REFLECTIVITY;

MOLDS; ORGANIC COATINGS; REFLECTION; SURFACE CHEMISTRY; X RAYS;

NANOIMPRINT LITHOGRAPHY;

ORGANOSILICON DERIVATIVE; POLYMER; SILICON DIOXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; MOLECULAR IMPRINTING; NANOTECHNOLOGY; X RAY DIFFRACTION;

MICROSCOPY, ATOMIC FORCE; MOLECULAR IMPRINTING; NANOTECHNOLOGY; ORGANOSILICON COMPOUNDS; POLYMERS; SILICON DIOXIDE; X-RAY DIFFRACTION;

EID: 78650917536     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201001761     Document Type: Article

References (34)

1. S. Y. Chou, P. R. Krauss, P. J. Renstrom, Appl. Phys. Lett. 1995, 67, 3114.
2. S. Y. Chou, P. R. Krauss, P. J. Renstrom, Science 1996, 5, 85.
3. J. Haisma, M. Verheijen, K. van den Heuvel, J. van den Berg, J. Vac. Sci. Technol. B. 1996, 14, 4124.
4. S. J. Colburn, M. Stewart, S. Damle, T. Bailey, B. Choi, M. Wedlake, T. Michaelson, S. V. Sreenivasan, J. Ekerdt, C. G. Willson, SPIE Proc. 1999, 3676, 379.
5. G. M. Schmid, M. D. Stewart, J. Wetzel, F. Palmieri, J. Hao, Y. Nishimura, K. Jen, E. K. Kim, D. J. Resnick, A. Liddle, C. G. Wilson, J. Vac. Sci. Technol. B. 2006, 24, 1283.
6. H. W. Ro, R. L. Jones, H. Peng, D. R. Hines, H.-J. Lee, E. K. Lin, A. Karim, D. Y. Yoon, D. W. Gidley, C. L. Soles, Adv. Mater. 2007, 19, 2919.
7. H. W. Ro, H. Peng, K.-i. Niihara, H.-J. Lee, E. K. Lin, A. Karim, D. W. Gidley, H. Jinnai, D. Y. Yoon, C. L. Soles, Adv. Mater. 2008, 20, 1934.
8. B. D. Terris, T. Thomson, J. Phys. D: Appl. Phys. 2005, 38, R199.
9. J.-S. Wi, H.-S. Lee, K. Lim, S.-W. Nam, H.-M. Kim, S.-Y. Park, J. J. Lee, C. D. Hong, S. Jin, K.-B. Kim, Small 2008, 4, 2118.
10. K.-J. Byoen, S.-Y. Hwang, H. Lee, Appl. Phys. Lett. 2007, 91, 0911061.
11. B. D. Gates, Q. Xu, M. Stewart, D. Ryan, C. G. Willson, G. M. Whitesides, Chem. Rev. 2005, 105, 1171.
12. Z. Nie, E. Kumacheva, Nat. Mater. 2008, 7, 277.
13. L. J. Guo, J. Phys. D: Appl. Phys. 2004, 37, R123.
14. Y. Xia, G. M. Whitesides, Angew. Chem. Int. Ed. 1998, 37, 550.
15. D.-Y. Khang, H.-H. Lee, Adv. Mater. 2004, 16, 176.
16. Y. Xia, J. J. McClelland, R. Gupta, D. Qin, X.-M. Zhao, L. L. Sohn, R. J. Celotta, G. M. Whitesides, Adv. Mater. 1997, 9, 147.
17. J. P. Rolland, E. C. Hagberg, G. M. Denison, K. R. Carter, J. M. DeSimone, Angew. Chem. Int. Ed. 2004, 43, 5796.
18. H. Schmid, B. Michel, Macromolecules 2000, 33, 3042.
19. B. D. Gates, G. M. Whitesides, J. Am. Chem. Soc. 2003, 125, 14986.
20. F. Hua, Y. Sun, A. Gaur, M. A. Meitl, L. Bilhaut, L. Rotkina, J. Wang, P. Geil, M. Shim, J. A. Rogers, Nano Lett. 2004, 4, 2467.
21. M. D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S. A. Lyon, S. Y. Chou, Appl. Phys. Lett. 2004, 84, 5299.
22. H. Gao, H. Tan, W. Zhang, K. Morton, S. Y. Chou, Nano Lett. 2006, 6, 2438.
23. G. Li, L. Wang, H. Ni, C. U. Pittman, J. Inorg. Organomet. Polym. 2002, 11, 123.
24. R. M. Laine, J. Mater. Chem. 2005, 15, 3725.
25. M. Joshi, B. S. Butola, J. Macromol. Sci., Polym. Rev. 2004, 44, 389.
26. R. Q. Su, T. E. Muller, J. Prochazka, J. A. Lercher, Adv. Mater. 2002, 14, 1369.
27. R. M. Laine, M. Roll, M. Asuncion, S. Sulaiman, V. Popova, D. Bartz, D. J. Krug, P. H. Mutin, J. Sol-Gel Sci. Technol. 2008, 46, 335.
28. H.-J. Lee, C. L. Soles, H. W. Ro, R. L. Jones, E. K. Lin, W.-l. Wu, D. R. Hines, Appl. Phys. Lett. 2005, 87, 263111.
29. H.-J. Lee, H. W. Ro, C. L. Soles, R. L. Jones, E. K. Lin, W.-I. Wu, D. R. Hines, J. Vac. Sci. Technol. B 2005, 23, 3023.
30. L. G. Parratt, Phys. Rev. 1954, 95, 359.
31. J. F. Anker, C. F. Majkrzak, SPIE Proc. 1992, 1738, 260.
32. Q. R. Huang, W. Volksen, E. Huang, M. Toney, C. W. Frank, R. D. Miller, Chem. Mater. 2002, 14, 3676.
33. H. W. Ro, K.-i. Niihara, L. Ming, H. Jinnai, D. W. Gidley, C. L. Soles, unpublished.
34. W. C. Oliver, G. M. Pharr, J. Mater. Res. 1992, 7, 1564.