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Surface Science
Volumn 605, Issue 5-6, 2011, Pages 597-605
Formation of wide and atomically flat graphene layers on ultraprecision-figured 4H-SiC(0001) surfaces
Author keywords

[No Author keywords available]
Indexed keywords

DAMAGE-FREE; DAMAGED LAYERS; DAMAGED SURFACES; DOMAIN SIZE; GRAPHENE LAYERS; STEP EDGE; SUBSTRATE SURFACE; SURFACE INTEGRITY; ULTRA PRECISION;
EID: 79751534997     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2010.12.025     Document Type: Article
Times cited : (30)
References (62)
  • 29
    • 79751534970 scopus 로고    scopus 로고
    • note
    • We used ultrapure water with a low dissolved oxygen content (#1 ppb) for all experiments. In ultrapure water, the total organic carbon (TOC) concentration measured by a TOC meter was 8 ppb, and inductively coupled plasma mass spectroscopy showed that the final content of each metal (Mg, Al, Ca, Cr, Mn, Fe, Ni, Cu, K, and Zn) in the water was reduced to less than 5 ppt.
  • 35
    • 79751529026 scopus 로고    scopus 로고
    • When the RHEED patterns were measured under the same conditions, the peak intensities were comparable. Note that the intensity was so intense that the CCD camera was saturated in Fig. 1(h). We cannot estimate the peak widths exactly, because of the finite size of the incident beams
    • When the RHEED patterns were measured under the same conditions, the peak intensities were comparable. Note that the intensity was so intense that the CCD camera was saturated in Fig. 1(h). We cannot estimate the peak widths exactly, because of the finite size of the incident beams.
  • 45
    • 79751524784 scopus 로고    scopus 로고
    • 3/2 peak shifted toward a higher binding energy when the phase was changed from √ 3 × √ 3 to 6 √ 3 × 6 √ 3. The C 1s peak has three components at the 6 √ 3 × 6 √ 3 phase [30], while the peaks were fitted by one component at the 1 × 1 and √ 3 × √ 3 phases. We evaluated the pure 6 √ 3 × 6 √ 3 phase based on the magnitudes of the Si 2p chemical shift and the C 1s components
    • 3/2 peak shifted toward a higher binding energy when the phase was changed from √ 3 × √ 3 to 6 √ 3 × 6 √ 3. The C 1s peak has three components at the 6 √ 3 × 6 √ 3 phase [30], while the peaks were fitted by one component at the 1 × 1 and √ 3 × √ 3 phases. We evaluated the pure 6 √ 3 × 6 √ 3 phase based on the magnitudes of the Si 2p chemical shift and the C 1s components.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.