Damage-free planarization of 2-inch 4H-SiC wafer using Pt catalyst plate and HF solution

Materials Science Forum

Volumn 600-603, Issue , 2009, Pages 835-838

  Okamoto, Takeshi ^a   Sano, Yasuhisa ^a   Hara, Hideyuki ^a   Arima, Kenta ^a   Yagi, Keita ^a   Murata, Junji ^a   Mimura, Hidekazu ^a   Yamauchi, Kazuto ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Atomic force microscope; Catalyst; Etching; Hydrofluoric acid; Interference microscopy; Planarization; Platinum; Silicon carbide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CATALYSTS; HYDROFLUORIC ACID; PLATINUM; PLATINUM COMPOUNDS; SILICON WAFERS; SUBSTRATES; SURFACE ROUGHNESS;

4H SILICON CARBIDE; ACID SOLUTIONS; ATOMIC FORCE; ATOMIC FORCE MICROSCOPE; DAMAGE-FREE; INTERFERENCE MICROSCOPY; OFF-AXIS; PLANARIZATION; SI FACES; ]+ CATALYST;

SILICON CARBIDE;

EID: 63849318135     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.600-603.835     Document Type: Conference Paper

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